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(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

N 45 49 M 54 58 K 6.5 8.5 J 7 9 H 12 15 G 36 46 F 32 40 E 25 30 D 11 13 C 10.5 13 [ ]: Individual pressure style 4.1-66 Direct Air Operated 3 Port Valve Series VXA31/32 For Air, Gas, Vacuum, Water and Oil Proper selection of body and sealing materials permits application of a wide variety of fluids.

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

Choice of output types: PNP, NPN How to Order D-M9PJ J M9 N L D Output specifications Lead wire length Symbol Specication L Between the sensor and amplier: 3 m, Amplier section: 3 m Symbol Specication N NPN output P PNP output Z Between the sensor and amplier: 5 m, Amplier section: 3 m D-M9NJ Dimensions [mm] Auto Switch Specications Indicator light D-M9NJ, D-M9PJ (With indicator light) Auto

XRAY-1250-100 XRAY-1250-100-POB XRAY-1250-200 XRAY-1250-200-POB Tandem XRAY1250-200 x-KIT-1250-100-COV XRAY-1250-100 x-KIT-1250-200-COV XRAY-1250-200 To Mount 6.5mm Prox. X-KIT-1250.I2MM To Mount 12mm Prox. X-KIT-1250-t8MM To Mount 1Smm Prox. The right to chnge designs and specifications without trolice is rcserved. All dat!

(choked flow) Subsonic flow : Flow greater than the critical pressure ratio Standard condition : Air in a temperature state of 20C, absolute pressure 0.1 MPa (= 100 kPa = 1 bar), relative humidity 65%. It is stipulated by adding the abbreviation (ANR) after the unit depicting air volume.

How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.

0 5 I 0 5 -a o -1 0 50 75 100 5 0 0 1 0 0 0 0 25 50 75 100 Input signal %F S Input signal %F S Relief flow characteristics suppty pressure: o 2MPa Pressure characteristics set pressure:0 05MPa Flow rate characteristics supptv pressure:0 2MPa 1 0 a $ 0 5 s 3 0 0 o o = o 0 0 0 1 0 2 0 Supply pressure lvlPa tlectro-Pneulnatis Series lTv203tr Repeatability Hysteresis Linearity @ 0 5 f, I3 o o

60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5

The IP address can be input manually only when "Manual" is selected. a) IP address type Manual/BOOTP, DHCP Manual Available Ethernet setting b) Auto MDI/ MDI-X Auto MDI/MDI-X Auto Available c) Duplex Full duplex/Half duplex Full duplex Available d) Speed Auto/100 Mbps/10 Mbps Auto Available When the total size (byte) of the I/O mapping is an odd number, 1 byte will be added automatically

The IP address can be input manually only when "Manual" is selected. a) IP address type Manual/BOOTP, DHCP Manual Available Ethernet setting b) Auto MDI/ MDI-X Auto MDI/MDI-X Auto Available c) Duplex Full duplex/Half duplex Full duplex Available d) Speed Auto/100 Mbps/10 Mbps Auto Available When the total size (byte) of the I/O mapping is an odd number, 1 byte will be added automatically

HRS HRS 090 HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRZ HRZD HRW Lots of variations are available in response to the users requirements.

, 521 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

AXT802-1A-l VG Cable Length Model VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimensions 1.5m 3m 5m VP Mounting direction D U D side mounting U side mounting VQ Note) The number of manifold stations cannot be changed.

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

The chart on the left illustrates the example when 100 [kPa], F.S. = 100 0 = 100 [kPa], 3.0% F.S. = 100 x 0.03 = 3 [kPa]. It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].