SMC Corporation of America
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L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11 FM PRS MOV P M C11 FM PRS M P IDF55E-30 IDF75E-30 GFCI R GFCI R GFCI GFCI TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP MC1 MC1 MC2 MC2 PRS1 PRS1 P P PRS2 THR PRR PRS2 THR PRR P P M M CM PRS OLR FM PRS1 PRR MC PRS2 TB MC1 ILS GFCI MC2 THR MOV C01 CM THS OLP1 C11 FM THP OLP2

Communication connectoe key P o w er su p p ly co n n ecto r key Bus adaptor 6 Sw i t ch set t i ng Saf et y I nst ruct i ons f or Set t i ng Turn of f t he pow er suppl y w hi l e set t i ng t he sw i t ch. I f t here i s f orei gn m at t er or w at er dropl et s around t he sw i t ch cover, cl ean i t of f bef ore openi ng t he cover.

P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000

P EA EB 3 position pressure center A B 5 EB P EA 3 position double check A B 6 EB P EA For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions. For details of the Series EX250 SI unit, please refer to the technical instruction manual.

Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 5mA Servo ON 1Ry 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS 16 N-OT

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

= 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1548

Indication Type P. 10-20-23 Band, Rail, Tie-rod Mounting MK(2) RS Q G RS H A RZQ MI W S CEP1 P. 10-20-26 Solid State Switches CE1 CE2 General Purpose Type P. 10-20-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 10-20-37 Direct Mounting 2-color Indication Type P. 10-20-42 Band, Rail, Tie-rod, Direct Mounting 2-color Indication Type with Diagnostic Output P. 10-20-

Type P. 9-15-23 Band, Rail, Tie-rod Mounting CNS CLS CLQ MLGP RLQ MLU P. 9-15-26 Solid State Switches ML1C DGeneral Purpose Type P. 9-15-27 Band, Rail, Tie-rod, Direct Mounting Normally Closed Type P. 9-15-39 Direct Mounting 2-color Indication Type P. 9-15-42 Band, Rail, Tie-rod Direct Mounting 2-color Indication Type with Diagnostic Output P. 9-15-50 Band, Rail, Tie-rod Mounting

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Select "P-1". U UP P D DO OW WN N b. When the "UP" and "DOWN" buttons on the driver operation are pressed, the display will be shifted as shown below, Select "P-3" and press the "SET" button. Point table No.1 No.2 No.3 No.4 No.5 No.6 No.7 c. The "UP" and "DOWN" buttons on the driver operation are pressed to Select "Spd", thenpress the "SET" button.

Proximity switch T TURCK P P&F W None B063 Arm opening angle Stopper Bolt Kit CKZ5 D J 15 H 30 The stopper bolt kit includes a stopper bolt and O-ring seal.

RSQ*-OM0080Q PRODUCT NAME STOPPER CYLINDER MODEL / Series / Product Number RS(D)Q12 RS(D)Q1650Z Contents Safety Instructions P.2,3 P.4 P.4 P.4 P.4 P.4 P.5 P.6 P.8 P.9 P.10 P.11,12 1. Specifications 1-1. Cylinder specifications 1-2. Single acting (Spring extended) spring force 2. Internal diameter and standard stroke 3. Operating air 4. Speed adjustment 5. Directional control 6.

Motor output [W] / size [mm] 100 / 40 200 / 60 Type of Motor AC servo motor (100/200VAC) Type of Motor S2,S3 Incremental 17bit encoder (Resolution:131072 p/rev) Type of Motor S6,S7 Absolute 18bit encoder (Resolution:262144 p/rev) specification Encoder Electric Type of Motor T6,T7 [With LECSB-T/LECSS-T]Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T]Absolute 18bit encoder