High Vacuum L Type Valve

MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

XLA- ∗ -F7NJ ∗ - ∗ Series

consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013-B 3-2.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Port size M5 RC1/8 Weight kg 0.45 1.1 Note1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

MHx-OMZ0003

Z Y Y X Z Z X X Y Z -0.4 -0.8 48.4 12 - 4 (www.smcworld.com) 4-1. JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

TA301

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR 2-M5 x 0.8 depth 7 (Mounting screw) VH VHS Dimensions/Manifold VVTA300-1 VVTA300-3 (Pitch) Max. 2 Max. 2 Pilot port Pilot port 4-M4 (Mounting hole) (Mounting hole) 4-M4 (P port) (Pitch) (P , R port) (R port) (A port) (A port) Individual Exhaust Common

MHR2/MDHR2

X 0.8 M3 X 0.5 Repeatability Air Fluid 0.2 to 0.6 MPa Operating pressure 0.15 to 0.6 MPa JIS Symbol Ambient and fluid temperature 180 c.p.m Max. operating frequency Lubrication Non-lube Note 1) Refer to page 494 Effective Gripping Force for details of Gripping force at each gripping point.

VY511, VYU5

READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Individual -X Technical data 1099

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

x 0.8 Rc 1/8 Piping port size Rc 1/8 Lock port CNS Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic lock Lock operation CLS Constraints associated with the allowable kinetic energy are imposed on the speeds at which the piston can be locked.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Individual -X 221

RLQ

-X Minimum auto switch mounting stroke Proper auto switch mounting position (detection at stroke end) and mounting height Operating range Switch mounting bracket: Part no. Individual -X 845

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .13200 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .13200 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .16940 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

IDX-OM-W031

Front L N PE Customer Connection Side Terminal Connecting Screw: M3 Applicable electrical wire: 1.25mm2 or more (Width 6.5mm and below) Panel Lock (x 2) Another one is on opposite side. IDFA Series 1-1 Parts Name and Functions 1 1 IDX-OM-W031 Air Dryer 1 Name and Functions Parts Panel Lock (x 2) (Only for IDFA75E) Another one is on opposite side.

ZISE20B.eng

Current pressure value (Main display) Output mode Hysteresis mode Item (Sub display (left)) Set value or peak/bottom value (Sub display (right)) Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L Reversed output Normal output [F 0] Units selection function ISE20B: 0.500 MPa/ZSE20B: -50.5 kPa/ ZSE20BF: 50.0 kPa Default setting Units specification Pressure range

ZISE20B-L.eng

Current pressure value (Main display) Output mode Hysteresis mode Item (Sub display (left)) Set value or peak/bottom value (Sub display (right)) Reversed output Normal output Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L [F 0] Display units, switch output specifications and diagnostic information selection function ISE20B: 0.500 MPa/ZSE20B: -50.0 kPa/ ZSE20BF

ZISE20.eng

Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) F0 Function setting F1 Function setting F99 Function setting Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L : Some products do not have all the functions. If no function is available or selected due to configuration of other functions, [-] is displayed on the sub display (right).

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Piston area (cm2) x 100 Operating direction R: Rod end (Clamp) H: Head end (Unclamp) Weight/Through-hole Mounting Option/Arm Bore size (mm) Unit: g Clamp stroke (mm) 10 20 50 Accessories Part no.