3

2 q w e r t y !1 !0 o i u Component Parts No.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Micro Mist Separator

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

VZM400

5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

OMS0020

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A070 (120mm Offset Machined ref NAAMS ACA176M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A052 (70mm Offset Machined ref NAAMS ACA156M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A052 (70mm Offset Machined ref NAAMS ACA156M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A034 (25mm Offset Machined ref NAAMS ACA136M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: X [w/o Arm on Right Side (D Arm Position Type Only)], R Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], L Arm Mtg Position: A (Mounting Position A), L Arm Style: A034 (25mm Offset Machined ref NAAMS ACA136M), Painted Arm: P (Paint)