MLGP

= 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100 100 100 80 CL1 80 50, 63 80 80 MLGC 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 CNG 32, 40 32, 40 32, 40 MNB 25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 =

Air Slide Table Series MXP

MXP6 MXP8, 10, 12, 16 L2 L2 Shock absorber model RB0805 RB0805 RB0806 Applicable size MXP10 MXP12 MXP16 L2 Table 2 L2 (mm) 10 (one side only) 10 (one side only) 9 8 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP8-10C MXP8-20C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Stroke Adjustment Urethane bumper Lock nut Lock nut MXP6 MXP8, 10, 12, 16 Shock Absorber Loosen the lock nut, adjust

Compact

overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] 11 Model Selection MXZ Series For Pressing (Clamping) (1) Confirm that the clamping jig weight and overhang are within the allowable range as shown in the graphs for transfer.

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

Slider Type Ball Screw Drive/11-LEFS Series

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200 LEY -X5 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 2000 2000 2000 2000 11LEJS Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0

MLGP

25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

Air Slide Table Series MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C Static moment Mr = W x 9.8 (L3 + C) W Examine Mr.

MXW Series Long Stroke Slide Table

=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Plug-in/Plug Lead: Single Unit

= 41n + 96 n: Stations (Maximum 12 stations) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n Dimensions 2 158 178 9 445 465 2 158 178 9 445 465 3 199 219 10 486 506 3 199 219 10 486 506 4 240 260 11 527 547 4 240 260 11 527 547 5 281 301 12 568 588 5 281 301 12 568 588 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 2-6-37 Base Mounted

KR

Spatter Cover 2: KR (Applicable tube: FR soft nylon, FR double layer) Applicable fitting size Model Installed L1 L2 D KR-08C1 KR-06C1 6 12.8 15 18 20 KR-10C1 KR-12C1 18 13.7 20 15.7 22 17.2 22 17.2 8 10 12 One-touch fitting How to install One-touch fitting Construction of spatter cover Install with matching A and B parts. 15-3-5

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2

Air Catch Sensor

entry (5m) Electrical entry (5m) Bracket 34 L2 34 L1 Bracket 34 (18) Deflection level indicator 10 10 Rc1/8 SUP.

SMC Electronic Switch Series Variations

entry (5m) Electrical entry (5m) Bracket 34 L2 34 L1 Bracket 34 (18) Deflection level indicator 10 10 Rc1/8 SUP.

Electric Slide Tables

250 500 200 400 L2 [mm] L2 [mm] L2 [mm] 150 300 Mep 100 200 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5

New

Rated voltage Rated voltage Electrical option Electrical option GDM2A-G-S2 24 VDC 24 VDC 12 VDC 100 VAC 100 VAC 110 VAC 110 VAC 200 VAC 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC 230 VAC 240 VAC 240 VAC 24 VAC 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5 48 VAC 24 VDC

IDX-OM-N030

Customer's cable connection Terminal block for signal L1 L2 L3 1,2: Operation 3,4: Failure 5,6: Remote control 1 3 2 4 5 6 Terminal connecting screw: M5 Crimped terminal width: 9.5mm or less Applicable electric wire: 3.5mm2 or more Customer's cable connection Applicable electric wire: 1.25 to 1.5mm2 Terminal block for power supply L1,L2,L3: Power supply PE: Ground L2 L3 PE L1 Customer's cable

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.