Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Restrictor Installed Fitting

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: W/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Stainless Steel One-touch Fittings Series KG

17 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 8 14.9 21.6 15.2 12 23 18.5 R(PT) 21.6 14.9 27 32 30 33 32 34.5 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A Rear flange: CBM2G Bore size Stroke -H -R -W N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Front trunnion: CBM2U Bore size Stroke A Rear trunnion: CBM2T Bore size Stroke -H -R -W N L -H -R -W N L A (mm) Axial foot Rear flange Bore size (mm) Z LS ZZ Double lock 152

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.

MGP

precautions Note 1) When using as a stopper, select a model with a stroke of 25mm or less. 1 5 10 20 30 40 50 Note 2) Model MGPL (ball bushing) cannot be used as a stopper.

RSQ

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN

Hand Valve Series VH 1

A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 9 Hand Valve Series VH Precautions Be sure to read before handling.

HRX-OM-R028

Prepare a cable referring to Table 2.3-1 and Fig 2.3-1.

Series KG Stainless Steel One-touch Fittings

3 8 KGU08-03 1 4 KGU10-02 61 62 65 40 28.4 30 40 65 R(PT) 19 3 8 KGU10-03 18.5 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 58.5 59 60.5 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Reference dimensions after R(PT) thread installation.

Intrinsically Safe Valve

A port N.O. (A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver. [Torque: Less than 0.074 lbfft (0.1 Nm)] Caution 1.

VK300

2 (A)2 (R)3 1(P) 3(R) (P)1 VV061 Flow rate characteristics Flow Rate Characteristics/Weight VV100 Weight (g) 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Operating pressure range (MPa) Port size Valve model C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27