4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

Compact Vacuum Ejector Series ZA

(Refer to Design and Selection on Specific Product Precautions 1.) Pressure sensor specifications Power supply voltage (Refer to Table (1).) Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.)

PF2D

4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.

Miniature Guide Rod Cylinder Series MGJ

6 w i !4 !3 y u r !1 q t !2 !5 e !1 No.

ChemicalThermo-con

Signal contents 9 8 7 6 3 1 2 1 Thermostat + 7 6 4 5 2 Thermostat Communication connector D-sub 9 pin (socket type) 3 Terminal A of resistance temperature detector Pin No.

IDX-OM-O004C

2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.7 . 2-5 2.3 . 2-6 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-2 4 4.1 . 4-1 4.2 . 4-1 4.2.1 () . 4-1 4.2.2 . 4-1 4.2.3 . 4-1 4.2.4 . 4-2 5 5.1 . 5-1 6 6.1 . 6-1 6.2 . 6-2 6.3 . 6-2 6.4 . 6-3 7 A 7.1 . 7-1 7.2 . 7-1 7.3 . 7-1 7.4 . 7-1 8 C 8.1 . 8-1 8.2 . 8-1 8.3

AC Servo Motor Driver (MECHATROLINK-II type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYM Operation Manual (Simplified Edition),section 4.4.1.

180

1!4 Piston assembly MHY-A1003 MHY-A1603 MHY-A2003 MHY-A2503 <16, 20, 25> wy!1!4!6 Order 1 piece of finger assembly per one unit.

Hydraulic Filters

Blanking cap 6 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 Suction Filter with Case FH99 series Micromesh 74, 105, 149 Negative pressure Differential pressure indicator Differential pressure indication switch Air breezer Cap 10 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 Suction Guard FHG series Micromesh 74, 105, 149 Negative pressure Max. 3.5, 7, 14, 21 MPa Paper 5, 10, 20 (Micromesh)

KN Series Nozzles for Blowing

1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1 25.4 23.7 33.6 31.8 40.1 38 52.4 8 8 19 20 21 21 22 36 37 75 76 149 152 328 D H1 A L1 Reference dimensions after R thread installation.

KA

KAL23-M5 15 9.6 16 15.5 M5 X 0.8 M6 X 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 17.5 1 8 KAL23-M6 KAL23-U01 10 10 15.5 KAL04-M5 M5 X 0.8 M6 X 1.0 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 20 20.5 KAL04-U01 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 16 KAL06-M5 9 5 6 M5 X 0.8 M6 X 1.0 18 3.5 3.5 8 8 KAL06-M6 16.5 17 1 8 20 3 8 KAL06-U03 24 23 21.5 14 12.8 KAL06-U01 10 6 23.5

AWG

tubing Symbol Nil 1 2 6 8 C J N W Z Applicable model AWG20 to 40 AWG20 to 40 AWG20 to 40 AWG30, 40 AWG20 AWG20 to 40 AWG20 to 40 AWG30, 40 AWG20 to 40 Symbol Port size 1/8 3/8 1/2 (4) 20 30 40 Thread type (5) Type Rc NPT G Symbol Nil N F (1) (2) (6) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) (3) When more than one specification is required, indicate

Fieldbus system (PROFIBUS DP compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

VP3145/3165/3185

Area: (800) 258-9200-www.stevenengineering.com 1 Single Pilot option VT Body size Nil Standard (Internal pilot) 1 4 6 1 2 1 External pilot VP 8 1 2 1 Type of actuation VG Body ported 5 Body type N.C.

Cylinder with lock

Grease on the groove Grease on the outer circumference A little less than 1 mm Range of grease L= Stroke 1 or more than 100 mm 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 18 Position for application of grease Grease application amount Unit: g Stroke 32 40 50 63 80 100 Positions for Bore size application of grease At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 1 0 50st added 1 1 1 1.5 2 3 37 - 4-4

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Number of tightening rotations Thread Model MS-5AUMS-5HMS-5P MS-5J MS-5N MS-5UN MS-5ALHU-6 MS-5HLHMS-5ATHU-6 MS-5ALHU-3, 4 MS-5UL MS-5UT MS-5ATHU-3, 4 Approx. 1/6 to 1/4 rotation Note) Use of Tube with Barb Fitting Caution 1. Cut the tube perpendicularly to the tube axis to a little longer length than required (use tube cutter TK-1, TK-2 or TK-3). 2.

Safety Instructions

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

CLQ

1 Aluminum alloy Nickel plated Piston Chromium molybdenum steel Chromated @5 9-10-12 12 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Construction: 40 to 100 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !

Compact Cylinder with Solenoid Valve/

+0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke

VCA

AXT632-68-2 VCA23-VVCA20-3-1 VV2CA2Material Mounting screw Steel Manifold valve Note 1) Gasket HNBR Manifold base Al Note 1) Gasket is included with manifold valve . Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.