44

02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12.5 15.9 12.5 15.9 13.6 17 15.8 19.2 19.6 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 24 27.2 13.8 15.6 13.8 15.6 16 17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53

One-touch Fittings

3/8 KQ2U08-03GS 17 13.2 13 46.5 41.4 14.2 13.2 8.7 8 4.2 25.6 17.7 7.3 32.7 A L 2 x O D 10 1/4 KQ2U10-02GS 17 15.9 15.6 49 44.3 15.6 15.9 10.1 8 4.2 40 28.4 9 25.6 3/8 KQ2U10-03GS 17 15.9 15.6 50.4 45.3 15.6 15.9 10.1 8 4.2 40 28.4 9.4 33.4 1/2 KQ2U10-04GS 22 15.9 15.6 54.6 48.2 15.6 15.9 10.1 8 4.2 40 28.4 9.4 61.3 H Connection thread (With sealant) Q Q 12 1/4 KQ2U12-02GS 19 18.5 18.2 53

KS/KX

KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68 76 94 88 14 4 10.4 10.4 8 17 1 4 15.2 18 18.5 6 26.1 18.0 3 8 Connection thread 1 4 52 18.5 23.5 21 10 3 8 1 2 3 8 1 2 22 7 36.3 29.5 53

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

T IDK Cover Cover installation latch 249 DMK Series Dimensions DMK6 36 0.1 36 0.1 44 37 (Socket side: With a cover) Panel mounting hole Panel mounting hole 4 x 4.3 M4 round head screw 40.5 59.5 SMC 6 1 19 26 36 2 5 3 4 11 36 45 38 DMK12 43 0.1 43 0.1 47 53 Panel mounting hole (Socket side: With a cover) Panel mounting hole 4 x 4.3 M4 round head screw 50.5 69.5 SMC 6 1 8 2 3 9 10 46 25

Wireless System

V (for control and input) Gray: Not connected 1 2 3 4 5 1 2 3 4 5 Connections Connections 20 EX600-W Series i Power Supply Cable with 7/8 Inch Connector/Power Supply Connector PCA1558810 Specifications Symbol Cable length (L) Connector specification 1558810 2000 Straight 1558823 6000 Straight 1558836 2000 Right angle 1558849 6000 Right angle Straight connector type Angle connector type 53

Bag Filter

L 53 Made to Order FGF Series Made to Order Elements Long service life element Sub-element + Standard element X46 X81 X49 X82 Sub-element HEPO element Eliminates large foreign matter.

99

Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO 2 Element size symbol Filtration accuracy (Filtration efficiency 99%) 701 801 901 For FGH100 For FGH200 For FGH300 002 004 006 013 2 m 4 m 6 m 13 m 70 HEPO 2 Element for FGH Series EJ Series Construction EJ701S, 801S, 901S FGD FGE FGG Reinforcement material FGA FGC FGF FGH FGH Filter media FQ1 FN EB ES Dimensions A B 70 53

No more element replacement!

port Rc2 500 Rc2 DRAIN 250 P.C.D238 3 x 20 For M16 basic bolt 10 Series FN1/FN4 Construction/Dimensions: Reservoir Tank, Dust Recovery Filter (Options, sold separately) Reservoir tank (when using the FN1) Dust recovery filter 108 32 0 45 315 70 70 P.C.D.220 270 90 (80) 50 135 180 225 4 x 11 (60) (266) AIR VENT G1/4 q q A (43) OUT IN e e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53

Thermoelectric Bath

(Green) Fan Alarm output connector 0.77 (19.5) 3.8 (96) Signal cable Model no. label 3.4 (86) 0.87 (22) 1.45 (37) 2.67 (68) Display/Operation panel Signal connector 4.6 (116)0.79 (20) Air OUT 5.4 (138) 3.9 (99) 2.4 (62) 1.4 (36) THERMO-CON 3.7 (95) SIGNAL WARNING Air IN Air IN 6.7 (170) 7.1 (180) ALARM PV WARNING SV OUT1 OUT2 DC AL1 DI RDY COM AL2 OUTPUT FUNC MODE COMMUNICATION AC 2.1 (53

ChemicalThermo-con

output connector 4.3 (110) Signal cable 16 ft (5 m) 4.1 (103) 2.6 (65) 1.06 (27) 3.9 (100) 5.1 (130) Circulating fluid outlet (1.2 )30)) 12.6 (320) 0.8 (20) 0.8 (21) Terminal block Display panel 6.7 (170) 5.6 (143) 4.7 (120) AL SI 8.5 (215) OUT FG B B A FG + EXT.SENSOR REMOTE ON/OFF 3.8 (97) 3.1 (79) ALARM PURGE OUT PURGE IN SIGNAL Purge inlet (M5) Fluid leak sensor CHEMICAL 3.0 (75) 2.1 (53

Thermo-chiller/Rack Mount Type

prevents leaked fluid from pooling at the bottom of the product. p. 36 Water leakage sensor * Not included for Option Z Drain pan Discharge of the circulating fluid Drain port (Rc1/4) Handle (Accessory) * Not included for Option Z and the HRR010 Cap Replacement particle filter element Cleaning of the dustproof filter Optional Accessories p. 36 Space saving Footprint can be reduced by 53%

Slider Type Ball Screw Drive/11-LEFS Series

LEC Y Motorless Overhang Displacement Due to Table Clearance (Reference Value) LAT Basic type High precision type LZ 0.12 0.25 LC3F2 LEF16 LEF16 0.1 0.2 Displacement [mm] Displacement [mm] 0.08 LEF25 LEF25 0.15 0.06 0.1 0.04 LEF40 LEF40 0.05 0.02 LEF32 LEF32 0 0 0 100 200 300 0 100 200 300 Overhang distance [mm] Overhang distance [mm] 53 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw) 2 x 9.5 counterbore depth 5.3 23 1 500.2 500.2 28 62 53

Series AK1000

0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International. 53

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12.9 17.5 29.4 12 29.6 33.8 28.8 34.6 9.6 10 7.8 11.7 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 13.7 20.6 32.5 13 34.6 6 ASD330FM-01-06S 39.6 14 11.6 13.7 29 22.9 38.5 35.2 30.2 14.2 11.8 10.6 R 1/8 12 32.1 27.1 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 18.5 31 28.2 44.8 6 ASD430FM-02-06S 12.8 17 53 25.2 43.5 18 8 ASD430FM-02-08S

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5 7 55 53.5 55 52 291. 54 291. 3 6.5 291. 13 M8 x 1.25 x 10 12-CY3R32 101. 111. 41.6 131. 7 65 63.5 67 62 361. 66 361. 5 6.5 361. 15 M8 x 1.25 x 10 12-CY3R40 L Model LD M MM N PW Q QW T TC W WP X Y Z 12-CY3R15 53

Rodless Cylinder for Vacuum Series CYV ø15, ø32

the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Theoretical Output (N) Magnetic holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm2) 15 0.1 0.2 0.3 59 15 32 18 35 53

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16" 11.4 52.2 6.2 25.2 53

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

03-3 44.8 6.3 21.8 49.1 43.6 9.3 40.7 13.5 12.7 20.7 48 42.5 5/32" 5.2 29 28 6 11.6 AS2051F-06-3 AS2001F-05-3 53.2 6.7 25.7 53.5 48.1 11.4 50 17 16.5 21.6 48.9 43.4 3/16" 6.2 49 34 14 10 3.5 12.5 6 12.8 17 13 15.5 3.5 AS2051F-08-3 AS2001F-07-3 59.8 8.1 27 54.8 49.4 13.2 52.2 18 17 22.5 49.8 44.3 7.1 1/4" 54 37 8 15.2 AS3001F-06-3 AS2051F-05-3 59 7.4 31.3 60.1 54.7 11.4 52.2 17 16.5 25.2 53