Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

CY1

(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)1/4 0.007 0.037 0.007 0.043 Q x R M8 x 1.25 x 16 M10 x 1.5 x 16 TC x R M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 S 106 111 124 150 176 188 TB 14 14 W 50 50 50 60 60 70 X 25 30 40 40 60 70 ZZ 132 137 156 182 180 192 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Mounting nut/included (2pcs.)

IR1000/2000/3000

(PT) 1/8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.



AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 1 4 1 8 3 Tightening Torque when Piping 2 1 Connection thread Applicable torque (N.m) M5 x 0.8 Rc Rc Rc Rc Rc Rc 1 Rc 1 Rc 1 Rc 2 4 3 6 1 Approx. rotation

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

5 Port Solenoid Valve, Series VQC

3/4 3(R) port 2-Rc 1/2 1(P) port 23 12 20.5 8 77.5 95.5 75.5 61.5 1.5 43.5 11.5 21.5 (6.5) 27 31 38.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 2-Rc 1/8 (Pilot EXH port) (mm) Formulas: L1 = 25n + 106, L2 = 25n + 241 (for 1 input block.

VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

Precision Regulator

1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

MGP

Connecting threads Rc 1/8 Rc 1/4 Rc 3/8 Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 Caution Caution 1. Do not scratch or gouge the sliding part of the piston rod or guide rod. This will cause air leakage or malfunction due to damage of the seals. 2.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

Air Fittings & Tubing

(mm) Thread RC(PT) Part No.

CM2

8 Rod seal Basic style, Boss-cut style, Clevis integrated style NBR HDU-8 HDU-10 HDU-12L HDU-14 6-4-11 12 Series CM2 Basic Style (B) CM2B Bore size Stroke Width across flats B2 2-Rc P Width across flats B1 WD S + Stroke ZZ + Stroke Cushion valve Width across flats 1.5 With air cushion With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

CNS

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA With rod boot CNS 75 CLS CLQ 15 40 l h + l ZZ1 + l + Stroke MLGP Long stroke RLQ Rc BQ plug with breathing hole BC element 4-J CL 2-MA Thread effective depth R MLU AL FA A K H GA F GB Rc BP Unlocking port GR GL T G G 2-Rc P Cylinder port (For NPT port) MM ML1C Q DD EA RY E LY LH V -X 4-LD Width across flats

Digital Flow Switches

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping. Do not apply wrench to anything other than the piping attachment as this may damage the switch. 3.

PF2A/PF2W

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping.

Free Mount Cylinder

16.5 31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

5

Auto switch Port thread type Nil Without auto switch Nil Rc TN NPT TF G Rod end bracket * For applicable auto switches, refer to the table below.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Manifold series Stations Rc Nil 02 3 10-SY3000 5 10-SY5000 2 stations G F ... ... N NPT 20 7 10-SY7000 20 stations NPTF T Includes the number of blanking plate assemblies.

Table of Contents

1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25 bottom hole dia. 6.8 Thread