Digital Pressure Sensor

b ZSM + _ PFl UNIT P.SET IFl 3.6-4

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

) 3-M3 X 0.5 thread depth 6 44 MDHR2-15E port position 42 B 45 120o 11 120o A C 36 M3 X 0.5 M3 X 0.5 Finger opening port Finger closing port 10 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25o 25o MHZ2 MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) MHL2 12h9 0 -0.043 Auto switch mounting groove MHR 1.5 .

High Pressure Coolant Valve

G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

IDX-OM-U010

A E D G F C P J Unit: mm M N H K O L Unit: mm Model Port Size A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 46 12.5 330 704 355 126 94 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 10 0 11.0 463 916 485 170 IDFC90 Anchor bolt location Hole diameter:13 Unit: mm IDFC80 IDFC90 IDFC60 745 (957) (Air dryer outside) (Air

VZA2000

(Value in the initial stage) VM Body ported Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size

Heatless Air Dryer ID Series

: 2 m) Exhaust regeneration (ID20, 30) (mm) A B C D E Mounting dimension J H L K G F 240 240 320 320 Model Port size Nominal size (B) ID20 ID30 ID40 ID60 1 4 1 2 1 2 3 4 120 120 170 170 45 45 75 75 520 615 850 961 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 95 95 95 95 134.5 134.5 183 183 222 222 302 302 59.5 59.5 88 88 9 9 9 9 136 ID Series Specific Product Precautions Be sure to read this

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Filtration 0.3 m Space-saving and easy piping.

ITV0000

Equivalent to IP65 Linearity within 1% (full span) Hysteresis 0.5% (full span) Repeatability 0.5% (full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or more) High-speed response time 0.1sec (without load) Air filter (5 m or less) IR (Precision regulator) W Features 1 Compact Electro-pneumatic Regulator Series ITV0 How to Order Single unit and single unit

Compact Guide Cylinder End Lock Type SeriesMGP

+ Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB

Air Suction Filter With One-touch Fittings Series ZFB 1

Length per roll (m) Tubing material Symbol T Material Nylon Symbol TI Material Nylon Symbol 20 20 m (Standard) Length Metric size Inch size TS Soft nylon TU Polyurethane TIS Soft nylon TIU Polyurethane Color Symbol B Color Black Symbol B Color Black Nylon Inch size Tubing size Soft nylon W White BU Blue W White Metric size Size Size R Red Symbol Symbol 0425 O.D. 4 6 8 8 10 10 A05 Size O.D

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Steam Valve

) Main port Port size: refer to table below (1.6) 23 24 (21) 45 27 Bracket (Option) 2 x 4.5 2 x M4 x 0.7 depth 7 18 50 Main port 1(A), 2(B) Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

A

300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000

Heat Resistant 2-Color Indicator

Choice of output types: PNP, NPN How to Order D-M9PJ J M9 N L D Output specifications Lead wire length Symbol Specication L Between the sensor and amplier: 3 m, Amplier section: 3 m Symbol Specication N NPN output P PNP output Z Between the sensor and amplier: 5 m, Amplier section: 3 m D-M9NJ Dimensions [mm] Auto Switch Specications Indicator light D-M9NJ, D-M9PJ (With indicator light) Auto

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats 7 Effective area: 2.4 mm2 Weight

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

XB13 CXT Standard part number M L Microspeed cylinder Specifications Guide cylinder Slide unit Compact guide cylinder Dual rod cylinder Compact slide Platform cylinder Magnetically coupled rodless cylinder CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Air cylinder/Standard type Freemounting cylinder Compact cylinder Compact cylinder Applicable cylinder M L M

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Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 100.0 to 100.0kPa 100.0 to 100.0kPa 101.3 to 101.3kPa 10.0 to 101.3kPa 0.1 to 1.000MPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40-m-22 (L)-(M) ZSE40 (F) ISE40-m-62 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2