PFxx-OMX0002

peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N Accumulated mantissa (Accumulated flow upper 4 digits) Accumulated mantissa x 10(Accumulated index) = Current accumulated flow Example: 990 x 100 = 990L Example: 9 x 105 = 999,900,000L : Figures less than the upper 4 digits U16 N 0x0 to 0x270F (0 to 9) 1 R 8040 0x1F68 are rounded down. 2 R Accumulated index

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6 MPa Pressure Gripping force (N) Gripping force (N) 15 15 0.6 MPa 0.5 MPa MHZ 0.5 MPa 10 10 0.4 MPa 0.4 MPa MHF External grip 0.3 MPa 0.3 MPa 5 5 MHL 0.2 MPa 0.2 MPa MHR 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa 0.5MPa 60 60 Holding force (N) Holding force (N) 50 50 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 30 30 0.2MPa 0.2MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Holding point L (mm) Holding point L (mm) 2.3-6 Series MHR2/MDHR2 Construction MHR2 !

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Maximum transmission distance: 4 m) * This function is not provided with the IO-Link compatible type. 1 unit 2 units 10 units Master Slaves (Max. 10 units) Slave sensors 1 unit 2 units n units (Max. 10 units) Master sensor DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () Blue Gray (Copy wire) Brown Blue Gray (Copy wire) Brown

Compact Hydraulic Cylinder

10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Not compatible 63 Phosphate hydraulic fluid 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Not compatible 80 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Note) Consult with SMC regarding the manufacture of strokes other than the above. 251 CHQWB Series Theoretical Output Unit: N Operating pressure (MPa

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Digital Flow Switch ( compatible)

(page 75) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 0 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated

SMC Pneumatic Clean Series

Appropriate tightening torque (Nm) Bolt Without auto switch With auto switch 6 8 10 10 1.06 M3 x 0.5 0.5 10 0.4 0.4 8 Allowable lateral load W (N) Allowable lateral load W (N) 0.3 0.3 8 Tightening torque Tightening torque 0.2 0.2 6 6 0.1 0.1 Allowable kinetic energy Caution 0 4 6 8 10 15 20 Stroke ST (mm) 0 4 6 8 10 15 20 Stroke ST (mm) When driving an inertial load, operate a cylinder with

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination available to order S Available with special request N Not available Note 1) This table is not applicable for 200.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

2 pcs 1 pcs n pcs Nil Without auto switch Refer to Standard Stroke on page 8-12-15.

Silencer Series AN

Make sure to verify the operating conditions of the actuator at least once a day. 5-10-13 5.34 AIR PREPARATION: ACCESSORIES SILENCERS SERIES (N)AN SERIES (N)AN SILENCER M3, M5, 18 SINTERED BRONZE Suitable for miniature valves and pilot air exhaust ports 13 21 dB noise reduction H O W T O O R D E R SERIES NAN SILENCER T E C H N I C A L SPECIFICATIONS NAN120-M3 (M3) NAN120-M5 (M5) NAN110-N01

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL 87 100 LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Digital Flow Switch (Integrated display type)

V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

V

U T O S W I T C H B O R E ( M M) P O R T L O C AT I O N 10 15 20 30 Side Ports E Top Ports R O TAT I O N 90 90 180 180 270 270 FOR MORE TECHNICAL INFORMATION ON D I M E N S I O N S S E E N E X T P A G E THIS SERIES, PLEASE REFER TO CAT:N350 A C C E S S O R I E S S E E N E X T P A G E FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N350 1.213 ROTARY ACTUATORS VANE