Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

How to Order VR 12 1 06 0 F Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 2 1/8 standard 1/4 standard 23 04 06 08 10 01 03 07 09 11 3.2 4 6 8 10 1/8" 5/32" 1/4" 5/16" 3/8" With One-touch fitting Use 1/8" tubing for 3.2. 1 Series VR120F Application Circuit Examples Self holding circuit 1. When "A" is turned ON, output goes ON. 2.

/4" 5/8" to 3/4" Weight, lbs (kg) 46.3 (21) 49.6 (22.5) 81.6 (37) Dimensions, LxWxH, in (mm) 18.2x6.1x9.1 (463x157x230) 18.2x6.1x9.1 (463x157x230) 22.4x8.1x11.4 (569x206x289) Pump with Explosion Proof Motor, 115V/208-230V, 60 Hz, 1 Phase, cUL Listed. 3046E-01 3086E-01 3166E-01

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/8AS2201FG-01-04AS2211FG-01-04AS2301FG-01-04AS2311FG-01-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/8AS2201FG-01-06AS2211FG-01-06AS2301FG-01-06AS2311FG-01-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/8AS2201FG-01-08AS2211FG-01-08AS2301FG-01-08AS2311FG-01-08

GD40-2-01

ID Main Parts Material Accessory Case Internal part Window Scale plate Zinc die-casted Brass, Phosphor bronze Polyester Stainless steel Nylon tube Male connector Male elbow T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.) IDG AMG Specific Product Precautions AFF AM Be sure to read before handling.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

AZ1000

2PW Delivery pressure Bonnet option Code Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Bonnet Standard Panel installation 4) No code P BP 01 Bonnet port (NPT 1/8 inch) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

GD40-2-01

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

CQS

Intermediate strokes at 1mm intervals are available by using exclusive body with requied stroke. products of CQS series Allowable Kinetic Energy Unit: J Bore size (mm) Stroke range Stroke range Stroke range Bore size Bore size 12 16 20 25 6 to 30 12, 16 1 to 30 12, 16 6 to 50 20, 25 1 to 50 20, 25 Standard 0.022 0.038 0.055 0.09 Method Long stroke Intermediate strokes at 1mm intervals are

Magnetically Coupled

Model Selection Operating conditions E: Kinetic energy of load (J) (W + WB) V 2 E = x ( ) 2 x 2.2 39.4 Es: Allowable kinetic energy for intermediate stop using an air pressure circuit (J) Fn: Allowable driving force (lbf) Ps: Operating pressure limit for intermediate stop using an external stopper, etc.