From the View menu bar "parameter (A)" please click on the "parameter setting (P)". "Parameter Settings" screen will be displayed. Please click on Read". 6.3.3 Parameter setting method Please set the parameters for each actuator. Refer to "LECSS Operation Manual,chapter 5 for details of each parameter.
SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.
SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 () () 1.1Nm ) SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1)
0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of
P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.
P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.
Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting
M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0
Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.
flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5 29 14 19 (40.4) 37.4 17 20.3 36 15.5 98 g * Value in ( ) is the dimension when the dust cover is used.
Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)
Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at
(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire) Width
Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at
(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire)
(Or None in the Case of No Switch), Switch Mounting Rod: P (w/Switch Mounting Rod)
(Or None in the Case of No Switch), Switch Mounting Rod: P (w/Switch Mounting Rod)
(Or None in the Case of No Switch), Switch Mounting Rod: P (w/Switch Mounting Rod)
Rated Pressure Range: -0.1 to 1 MPa, Piping: TSJ1/4, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m
The weight will increase by 6kg when option T [High pressure pump] is selected. *12 In case option T [High pressure pump] selected. *13 In case option T [High pressure pump] selected, this fitting is not enclosed as accessory. *14 In case option J [Automatic fluid filling] selected.