XL-OMY0002

8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400

XL-OMY0001

/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

PF2D

l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications for Sensor Unit PF2D504 PF2D520 PF2D540 Model Measured fluid Liquid not to corrode nor erode deionized water

NCA1

Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature

NCA1

Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature

Electromagnetic Digital Flow Switch

Note Panel mount adapter ZS-26-B With waterproof seal, mounting screw Front protective cover + Panel mount adapter ZS-26-C With waterproof seal, mounting screw Front protective cover only ZS-26-01 Separately order panel mount adapter, etc. Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc.

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

EX510

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)

Compact and

Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 40 40 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 60 Vacuum pressure Vacuum pressure 40 60 60 30 30 Air consumption

T

Barb one-touch Reducer 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28 5 Miniature Fittings Series M Barb fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. x I.D.

HAW

200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 HAW22 17 HAW37 25 Maintenance 7000 8600 10 34.5 36 37 40 44 46 38 40 42.5 43 49 54 36 Caution HAW55 1.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

/8, 1/2 70 156.2 25.5 35.5 38.4 40 35.5 HF2-BFD40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 16 Document No.AMX-OMZ0106 Revision history Rev.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

end (E) 32 40 Head side pivot (C) 12 12 20 40 Double rod (W) Block mount (R) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch.

IP8001 Series

(%) or 10% position 10% input value (%) setting (%) or 20% position 20% input value (%) setting (%) or 30% input value (%) 30% position setting (%) or 40% position 40% input value (%) setting (%) or 50% position 50% input value (%) setting (%) or 60% position 60% input value (%) setting (%) or 70% position 70% input value (%) setting (%) or 80% position 80% input value setting (%) or (%)

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant