CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For valve weight, refer to page 2-3-10.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

S

0.94 0.75 NY-J015 10 (3/8) 0.39 0.54 .188 .188 0.56 No10-32UNF 0.94 0.75 NY-J015 15 (5/8) 0.39 0.54 D I M E N S I O N S C L E V I S A N D T R U N N I O N P I N d m t Part No Bore Size D L l .095 0.03 0.018 NCT-P006 6 (1/4) .125 0.81 0.70 .147 0.04 0.029 NCT-P010 10 (3/8) .188 0.94 0.81 .147 0.04 0.029 NCT-P015 15 (5/8) .188 1.25 1.11 S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Valve type Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Refrigerated Air Dryer

Refer to page 97 for details. 89 Refrigerant R134a (HFC) Standard Inlet Air Series IDFBE 3E, 4E, 6E, 8E, 11E, 15E (Inlet air temperature: 100F [37.8C]) How to Order IDFB 11 N 11E Nil A K R S T V Size Size 3E 4E 6E 8E 11E 15E Voltage Symbol Voltage Single-phase 115 VAC (60 Hz) 11 Thread type Thread type Drain tube size Symbol N 3/8 NPT (female) Nil 0.4 in [10 mm] Rc (female) Note) Note) An

Parallel Style Air Gripper: Wide Type Series MHL2

F = one finger thrust. 2 1 2 1 MHL2-10D MHL2-16D MHL2-16D MHL2-10D 60 60 25 25 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) Pressure 0.6 -MPa Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa 0.5 MPa Pressure 0.6 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 5 0.2 MPa 5 10 10 0.2 MPa 0.2

Title not found

-32 Thru 10-32 * Lock nut and washer included C Thread 9/32 7/16 Hex 5/16 Hex 1/2 D B Hex 1/4 1/4-28 3/8-24 A Thread 71 RB 4-28-10 * RBB 3/8-10 R e d u c e r B u s h i n g D i m e n s i o n s A Tthread 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/8 NPT 1/8 NPT 1/16 NPT 1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

ChemicalThermo-con

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except

MK

(mm) 10, 20 20, 50 Allowable moment Nm (1) 47 107 1 3.8 7 13 27 182 Theoretical clamp force N (2) 525 825 40 75 100 185 300 1400 MK/MK2 Air Fluid 1.5 MPa Proof pressure RSQ/RSG 0.1 to 1 MPa Operating pressure range Without auto switch 10 to +70C (No freezing) Ambient and fluid temperature RSH With auto switch 10 to +60C (No freezing) Lubrication Non-lube CE1 Port size Rc(PT) 1/8 Rc(PT) 1

1

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

JA/JAH/JB/JS

-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125 144 70 80 90 69 79 89 4 4 4 18 18 22 20 22 24 41 46 55 24 38 42 2 2.5 3 22000 36000 55000 10-19-9 10 Floating Joint: For Compact Cylinders Series JB Specifications Specifications Maximum operating tension and compression force (N) Allowable eccentricity U

JA/JAH/JB/JS

-30-200 JAHL100-42-300 63 80 100 24 30 42 155 187 213 88 96 116 56 67.5 78 4.1 6.4 10 2 2 3 38 45 55 66 79 96 54 60 74 36 44 48 102 125 144 70 80 90 69 79 89 4 4 4 18 18 22 20 22 24 41 46 55 24 38 42 2 2.5 3 22000 36000 55000 10-19-9 10 Floating Joint: For Compact Cylinders Series JB Specifications Specifications Maximum operating tension and compression force (N) Allowable eccentricity U