Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

ITV0000

VAC ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC z port 3 3 (6, 1/4") 40 40 EXH, ATM c port 25 25 (6, 1/4") 2 2 2 5 5 OUT x port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page

5 Port Solenoid Valve Series SQ1000/2000

(0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

Slider Type/Ball Bushing Bearing

/Double axis: 25, 32 How to Order CY1H 25 300 Y7BW Made to Order Linear guide type Refer to page 1529 for details.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Low Profile Guide Type

CY1F10 to 25-AAL CY1F10 to 25-AAR For shock absorber fixing L Set screws (4 positions) Note1) approx.

AC Servo Motor Driver (SSCNET Type)

L A B C Lead 20 10 5 2.86 20 10 5 Parameter *1,*2 Para.

NCA1

25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore

NCA1

25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA + Stroke ZA XA SA LF P Y WF S J G B FA AT EE AO EA AL E AH DD AE D AB C Bore size (in) AA BA A KK MM 200 (2") 6 6 3 5/8 2.40 2.09 1 3/8 1 3/4 1.06 1.26 1 1/2 3/8 1/8 3/8 9/16 0.3 1 2 1/

Cylinder

CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Refrigerated Air Dryer

45 50 45 50 55 60 65 70 75 80 5 10 15 1.73 1.15 0.59 0.62 1.3 1.07 1 0.72 1 1 1.68 0.81 0.82 0.95 0.88 0.68 0.9 0.95 0.57 0.86 1 0.82 1.06 0.79 1.11 1.16 Data Ambient temperature Data Air flow capacity Series IDF Series IDU Series IDF Correction factor Correction factor Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E Ambient temperature (C) Ambient temperature (C) 25 30 32 35 40 25 30

NCA1

Bore Model No. 150 (1.5) 200 (2) 250 (2.5) 325 (3/25) 400 (4) D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 M8-3pin M8-4pin M12-4pin Connector Style 1 2 1 4 Pin arrangement 2 1 3 4 4 3 3 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand voltage IP-67 (IEC529 standard) 100Mor

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

VNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body material Stainless steel: S NBR : A FKM : B EPR : C Fluid BC6: Standard NBR : A FKM : B EPR : C Aluminum: L NBR : A FKM : B EPR : C Seal material Applicable fluids VX3 Air (Standard, Dry) Refer to Table (1) to check that the desired fluid is applicable

Table of Contents - Tubing

Colors indication Color Black Clear Blue White Symbol B C BU W Color Yellow Red Green Orange Symbol Y R G YR Colors other than Black are made to order only.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

Short Stroke Electric Actuator Series LX

(B contact) Number of proximity switches Refer to page 318 for detailed specifications of proximity switches. 1 pc. 2 pcs. 1 2 6 pcs. 6 Specifications mm kg C kg mm/s mm 25 0.8 50 1.0 75 1.1 100 1.2 5 to 40 (with no condensation) Standard stroke Body weight Operating temperature range Work load Speed Positioning repeatability 3 (2) horizontal Note 1) Performance to 30 Note 2) 0.03 Motor