Oval pad with adapter; Vertical vacuum inlet direction; Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30; Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber; M5 x 0.8 vacuum inlet

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

HRX-OM-W032

Table 3-3 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker *1 Terminal Cable Model Power supply block Recommended Sensitivity specifications Rated voltage screw crimp terminal of leakage *2 current diameter current (A) (mA) 380-415 VAC 4 x 5.5 mm2 50/60Hz 3 phase, (4 x AWG10) HRS200-A-46-S M5 R5.5-5 30 30 *Including 460-480 VAC 60Hz ground 3 phase *1.

Air cylinder

Note 2) When tightening the cone points of hexagon socket head cap screw (M4 x 8 L), keep the tightening torque within 1 to 1.2 Nm. Note 3) The torque for tightening the hexagon socket head cap screw (M2.5 x 6L, M2.5 x 9 L) is 0.2 to 0.3 Nm.

CRA1

Mounting screws included in foot bracket Size Foot bracket 30 M5 x 0.8 x 25 CRA1L30-Y-1 50 M8 x 1.25 x 35 CRA1L50-Y-1 63 M10 x 1.5 x 40 CRA1L63-Y-1 80 CRA1L80-Y-1 M12 x 1.75 x 50 100 CRA1L100-Y-1 M12 x 1.75 x 50 Note 1) The part numbers shown above include mounting screw. Note 2) As ordering foot bracket, write 1 piece for the bracket for one rotary actuator. 11-7-2

HRX-OM-R026

mm2 30 M5 (Power supply) 50/60Hz (3 x AWG10) (Power supply) 3phase HRSH090-A-4020 AC460-480V HRSH090-W-401 x 14 mm2 (1 x AWG6) R14-5 60Hz (Grounding (Grounding cable) 3phase cable) 1: A specified earth leakage breaker is installed for option B [Earth leakage breaker] or option S [CE/UL] of each model.

-fl Seies

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in Type

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

25 20 25 x 30 25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 47 71 94 118 141 165 212 236 189 217 326 434 543 651 760 977 1085 868 MGZ25 12 76 113 151 189 227 265 340 378 302 324 486 648 811 973 1135 1459 1621 1297 MGZ32 16 121 181 241 302 362 422 543 603 482 507 760 1013 1267 1520 1773

ZL3-OM00601

Adapter assembly for bottom porting ZL3-AD3-A Bottom mounting Female screw (4 x M5 x 0.8, depth: 6) Recommended tightening torque Bottom mounting: 1.3 to 1.5[Nm] 7 Doc. No.ZL3-OM00601-B 3.1.3 Precautions 1) When installing the product, allow sufficient space for maintenance and inspection. 2) Tightening torque exceeding the recommended value may damage the product and mounting screws.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

POTiS J inch(mm) n: stations L t 4 5 7 I 'to Equation L1=1.lOxn+1.85 (L r= 28 x n +47) Lr:1.1Oxn+2,2O (L,:28 x n +56) Lr (75) 4.06 (r03) 5.16 (131) 6,26 fl59) 7.36 (187) 8.46 (2|5) 9.57 \243) 10.67 (271) 11.77 (299) 12.87 (327) Lr 3.31 (84) 4.41 (112) (140) 6.61 (r68) 7.72 (196) s.a2 \224) 9.92 (252) 1t.02 (280) 12.13 (308) 13.23 (336) Series NVFRz000:Base Mounted Tlzpe Manifold Ptug-in

HRX-OM-W060

Table 3.3-1 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker Terminal Power Recommended Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 4 cores x AWG10 (4 cores x 5.5 mm2) HRL100-A-20 3-phase R5.5-5 30 200V AC including (50Hz) ground M5 30 4 cores x 3-phase HRL200-A-20 40 AWG8

VNH

x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.

2/3 Port Valve

X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam Steam Valve SeriesVND 2 Port Valve for Steam MAX.180oC

MXW

Auto switches are shipped together (not assembled). 150 Series MXW Air Slide Table Specifications Model MXW8 MXW16 MXW20 MXW12 MXW25 12 x 2 17 or its equivalent 16 x 2 23 or its equivalent 20 x 2 28 or its equivalent 25 x 2 35 or its equivalent ( ) ( ) ( ) ( ) 8 x 2 11 or its equivalent ( ) Bore size (mm) Rc 1/8 M5 x 0.8 Piping port size Fluid Air Action Double acting MXH Operating pressure

Speed Controller with One-touch Fittings

n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 1 Refer to page 618 for L8. 2 The above figure shows the manifold with controllers connected using two L-brackets and a threaded stud kit for manifold.

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23