Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

energy saving effect

Applicable model Minimum operating flow rate [L/min] To circulating fluid outlet r t HRSH100-20 w HRSH150-HRSH200-HRSH250-W25 r q HRS-BP005 y HRSH250-AHRSH300-A40 To circulating fluid return port r t u r e Parts List No.

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Modular Type Regulators Series AR

IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.

4

AC Manual override r t In the case of indicator light assembly Terminal no. 1 Coil r y u Terminal no. 2 DC In the case of indicator light assembly q q Terminal no. 1 (+) () () () () Coil w w Terminal no. 2 () e e () () Electrical Connection When energizing the molded coil r, the armature t is magnetically attracted to the core y, and through the push rod u, it pushes down the

90

With exhaust interference prevention valve Note 23, 25) W Exhaust interference prevention valve Note) Refer to page 31 when mounting single unit to DIN rail. 2 Series ZK2 How to Order Manifold A ZZK2 04 1 L q w t y e r Remains blank when option is not selected.

Air Pilot Operated

PC 0roGl 1 1 8 Typ "N" w/Operator & (4) Screws \2:) Alum. O.C. PC 0101.1 1 1 C Typ "8" Wo OpeEtor w/{4) Screws Alum. D.C.PC 0110,1t 1 1 D Type "A" W/opelator & (4) Scrws Alum. D.C. P C 0 1 1 1 . r l O.Flnq ' Op6ralol Buna N 13 Recessd Non.Locking Operator PB 0103 1 4 Screws .

NCA1

Auto Switch Standard D w/Auto Switch (Magnetic Piston) Style Standard Cylinder K Non-Rotating Cylinder W Double Rod M Male Rod Stud Mounting No. of Switches 2 Pieces S 1 Piece n n Pieces B MX0 Basic L MS1 Foot Bore Size 150 1.5 200 2 250 2.5 325 3.25 400 4 For larger bore sizes up to 32 bore.Please consult CAT: N304-EX F MF1 Front Flange G MF2 Rear Flange R MS4 Side-Tapped See Auto

CJ5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

Free Mount Cylinder Series CU

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Guide Cylinder Series MGG

r y !

/

e t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

Air Cylinder Series CM2

-W MB N L MB1 CA2 ZZ + Stroke LS + Stroke CS1 N L CBM2G Bore size Stroke Head side flange style: A -H -R -W Rod side flange style: CBM2F Bore size A Stroke -H -R -W CS2 N L Z + Stroke N L Double clevis style: CBM2D Bore size Stroke A -H -R -W Single clevis style: CBM2C Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke ZZ + Stroke Z + Stroke CBM2U Bore size Stroke Rod side trunnion style

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Air Cylinder

6 o r t qy w e!7 iu !8 CJ1 CJP CJ2 JCM CM2 CM3 With air cushion CG1 CG1 q r !2 !1 !8 !4 w !0 e i !5 !9 !3 o !6 t !7 CG3 JMB MB MB1 CA2 CS1 CS2 Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed