Digital Flow Monitor

Press the button 2 seconds or longer.

High Vacuum L Type Valve

52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

CRJ

Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2-wire, with 2-switch AND connection 2-wire, with 2-switch OR connection Brown [Red] When two switches are connected in parallel, malfunction may occur because the load voltage will increase when in the OFF state.

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Total Land Area: 55,647m 2 Floor Space: 23,022m 2 Total Land Area: 124,227m 2 Floor Space: 17,204m 2 Tohno Factory (Iwate Prf.) Total Land Area: 60,638m 2 Floor Space: 10,622m 2 Tsukuba Factory (Ibaragi Prf.)

MVGQ

62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Rotary Cylinder Series MRQ Size: 32, 40 1

Load at end of lever Position of rotational axis: Perpendicular to the plate through one end 2 1 2 2 a + K = m1 + m2 3 a Ex.) When shape of W2 is a sphere, refer to u, and 4a + b 2 1 2 4a + b 2 2 2 = m1 + m2 12 12 It becomes K = m2 2r2 5 5. Thin rectangular plate (Rectangular parallelepiped) 10.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

MRQ

Referring to case u where "W2" is a sphere, 4a +b 2 2 2 4a +b 2 1 2 1=m1 +m2 12 12 2 r K=m2 5 2 tThin rectangle board (Parallelogram) !0Gear transmission Position of rotation axis: Passes through center of gravity and perpendicular to the board. (Same formula regardless of board thickness.) 1. Find moment of inertia1B around the rod (B). 2.

Soft Start-up Valve

29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4, 1 3/4, 1 3/4 128 109 59 53 74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54

DOC1023126

item. *2 Latest version of the configuration software must be used.

Soft Start-up Valve

29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)m-A 3/4, 1 3/4, 1 3/4 128 109 59 53 74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54

CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Bernoulli Gripper

4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m ZNC80m 30 70 0.5 [MPa] 0.5 [MPa] 60 25 0.4 [MPa] 0.4 [MPa] 50 Lifting force [N] Lifting force [N] 20 0.3 [MPa] 0.3 [MPa] 40 15 0.2 [MPa] 0.2 [MPa] 30 0.1 [MPa] 0.1 [MPa] 10 20 5 10 0 0 0 3 2.5 2 1.5 1

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

1 2 3 4 5 Nil 1 2 3 Orifice dia. 2 4 8 10 16 Body class 1 2 3 4 5 None With flow rate adjustment With bypass With flow rate adjustment & bypass Valve type LVQ 0 1 2 N.C.

Floating Joint

2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 10 10 12 12 12 16 16 20 24 27 27 33 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 D-X Technical Data 1147 JA Series Foot Type: JAL20 to JAF160 JAL20 to 100 Center of sphere 2 x J R JAL125 to 160 4 x J Center of sphere R (mm) Maximum operating tension

Compact Cylinder

Load Switch 1 Load Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example) Load impedance: 3 k Auto switch leakage current: 1 mA Power supply Residual Load voltage at ON = voltage voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example) Power supply voltage: 24 VDC Auto switch internal voltage

Digital Flow Switch

[HYS] Hysteresis mode [2ot] Switch operation of OUT2 2 [2_P] Normal output [F 2] [oU2] page 39 [P_2] Set value of OUT2 2 [100] 100 L/min [H_2] Hysteresis of OUT2 2 [ 10] 10 L/min [F 3] [rES] [rES] Response time [1.00] 1 second page 44 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 45 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 46 [F20] [inP]

Manifold Specifications

Symbol Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol 1 K plug connector 3-7-31 Series VZS3000 How to Order Manifold Assembly Manifold Specifications Port size Rc 4(A) 2(B) Stations Porting specifications 4(A), 2(B) Port Please indicate manifold base type, corresponding valve, and option parts.