Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

DOC1023126

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 to 100 EQY251 to 50 EQY321 to 70 Torque when held *2 50 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 150 100 Sets the position loop P constant.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

Speed Controller with

Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AMD550-10 22 AM550-10 AMD550-10 37 AM650-14 AMD650-14 55 AM850-20 AM850-20 AMD850-20 75 IDU3DIDU3DIDU4DIDU6DIDU8DIDU11CIDU15CIDU22C1-3 IDU37C1-3 IDU55C-3 IDU75C-3 AMD850-20 110 AMD910-30 150 AMD1010-40 220 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

EXxx-OMU0020EN

There are two options 2 x M12 to M12 2 x M8 to M12 Model No.PCA-1557785 (Y branch Connector (2 x M12 to M12)) Fig. 10-2 PCA-1557785 -52No.EX##-OMU0020-A Model No.PCA-1557798 (Y branch Connector (2 x M8 to M12)) Fig. 10-3 PCA-1557798 -53No.EX##-OMU0020-A 10.3. Seal cap Seal caps can be used with the EX245-DX1 and EX245-DY1. Mount the seal cap in the unused socket.

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 6 4 6 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46

4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

Compact Electric Actuator Series LG1

4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 210 A (Table movement range) 78.5 (78.5) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 1 D 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 8(4)-6.2 C 100 () () (170) 95 95 B 110 20 (150) () () Dimensions A 329 429 529

Suction cups with flange

ZXP7-PFL1 20 X1 1) Cup series 2) Cup diameter 3) Cup form 4) Cup material 5) Attachment *2 Symbol Cup Series Symbol Cup Symbol Cup form Symbol Material Symbol Attachment diameter ZP Basic 08 8 Flat Nil With (guide) attachment Bellows type for film 10 10 Flat with rib S Silicone rubber (White) *1 M With mesh attachment ZP3P packaging *2 Only applicable to the cup 13 13 B Bellows Urethane

IDX-OM-V020

DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12

IMPACT BLOW GUN

Symbol Type Nozzle length Nozzle part no.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D

3

40 40 50 P1 = 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa 30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 4 5 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 0.001 0.01 0.1 0.002 0.003 0.02 0.03 0.04 0.004 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when water [15 L/min] runs through the solenoid valve with a Kv =

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Switch Pressure range 0.1 MPa 0 2 MPa 10 MPa 1 MPa 5 MPa ISE70 For 1 MPa (For air and general fluids) 0 0.105 MPa 1 MPa 1.05 MPa ISE70G 0 0.105 MPa 1.6 MPa For 1.6 MPa (For air) ISE71 1.68 MPa 0 0.105 MPa 2 MPa For 2 MPa (For general fluids) ISE75G 2.1 MPa 0 0.25 MPa 5 MPa For 5 MPa (For general fluids) ISE76G 5.25 MPa 0 0.50 MPa 10 MPa For 10 MPa (For general fluids) ISE77G 10.5 MPa Rated

EtherNet/IP TM Compatible Fieldbus System

cable. 1 6 Branch port C(COM C) 7 Branch port D(COM D) 8 Display window Displays the status of the power supply and the communication with the PLC. 2 9 Switch cover Sets the address, etc. with the switch inside. 2 10 Grounding terminal (FE) Used for functional grounding.

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly