Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

KFG2 MS KKA KP LQ MQR T IDK 165 KS Series Male Connector: KSH (Standard) H (Width across flats) Effective area (mm2) Applicable tubing O.D.

Low torque Metal seal type Rotary joint Series MQR

Name Material Remarks 1 Body Aluminum 2 Adapter plate Aluminum 3 Spool Special stainless steel 4 Sleeve Special stainless steel 5 Gasket H-NBR 6 Flange Aluminum 7 O-ring H-NBR 8 Spring pin Carbon steel 9 Bolt Carbon steel Not in 2 circuit model 10 Bolt Carbon steel 11 Retaining ring Carbon steel 12 Radial bearing Allowable leakage according to differential pressure 6000 MQR12 Port-to-port

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

IDX-OM-W017

IDFA3E/4E C32FP-260S C42FP-260S 1 IDFA6E15E1 1 IDFA3E/4E IDF-S1932 2 IDF-S1933 1 IDFA6E15E1 4-2 44 IDFA Series IDX-OM-W017 5 5 5-1 3 ON OFF 600mm 1 10% () ( 60cm 1 ) 10% 3 IDFA Series 5-1 5 1 IDX-OM-W017 5 () 60cm 1 2 INOUT INOUT () IDFA Series 5-1 5 2 IDX-OM-W017 6 6 6-1 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3 12 24 36 65 80 120 7 15 31 46 83 101 152 3/h

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Accuracy: H (High Precision Type), Size: 63, Motor Type: T7 (200W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Accuracy: H (High Precision Type), Size: 40, Motor Type: T6 (100W Output, Absolute Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Length: 5m, Driver Type: S2 (LECSS2-T, 200-240V, Absolute, SSCNET III/H), I/O Connector: H (w/Connector)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: S3 (200W Output, Incremental Encoder), Lead: H (LEFS25, 20mm; LEFS32, 24mm; LEFS40, 30mm), Stroke: 1000mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: Housing B, Bottom

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: S3 (200W Output, Incremental Encoder), Lead: H (LEFS25, 20mm; LEFS32, 24mm; LEFS40, 30mm), Stroke: 1000mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: Housing B, Bottom

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

VQ7-6/7-8

SMC SMC SMC 23 20 B A VZ 9 PA A B VF B A VFR PA A B VP4 L1 L2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 4) Values for the low wattage (0.5 W) specifications. 2 position double (Double solenoid) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 3 position closed center 4 position dual 3 port valve (B) 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 4 2 5 3 1 1 (P) 5 (R1) 3 (R2) N.O.

Digital pressure switch for energy-saving control ejector

P_1 = A-(A-B)/4 A = Maximum pressure value H_1 = | (A-B)/2| B = Minimum pressure value To clear the stored auto-preset settings, press the and buttons simultaneously for 1 second or longer. -29No.TQ0010298-OM003-B [F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5% R.D.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1 IO-Link master Number of ports and connector Symbol Number of ports Connector Port specifications B 4 ports M12 connector Symbol Content A Port Class A B Port Class B Summary of Product parts EX600-L#B1 No.

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

VK3000

2 (A) 4 (B) 2 (A) 4 Flow Rate Characteristics/Weight 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R) Flow rate characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Mounting with VK300 Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet VV061 The VK300 series can be mounted on the same manifold base VV5K3 of VK3000 series.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

VNH

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111