Safety Instructions

Low frequency operation In order to prevent malfunction, conduct a switching operation of a valve every 30 days. Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 17-6-10

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

Pneumatic Purification

Odour Removal Filter : Series AMF Standard features MODEL FLOW PORT B C D WEIGHT ELEMENT A NPT in in in lb (cfm) Die-cast Aluminum with chromate treatment No screw threads or tie rods are required therefore removal and replacement of element is made quick and easy (AMF) Two sight glasses are fitted to the housing to give a visual indication of the filter operation and condition (AMF) in

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

TL/TIL

At a temperature of 20C bend the tubing into a U shape.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with

Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

Mechanically Jointed Rodless Cylinder Series MY1

Use 0.3 to 0.7 times the thrust (differs depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic moment M Mounting orientation Dynamic load FE Horizontal Ceiling Wall Vertical Z 1.4 100 x a x mn x g a a 1 3 x FE x Z ME Dynamic moment Dynamic moment ME does not occur.

10-cl1-e

Seal kit includes a grease pack (40, 50: 10 g, 63, 80: 20 g, 100: 30 g, 125 to 160: 40 g). Order with the following part number when only the grease pack is needed.

10-cy1h-e

Grease pack part no. for 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 25: GR-S-010 (10 g) Wear ring A Special resin 10: Not available CY1H10-PS 10 CY1H10-PS Wear ring B Special resin CY1H15-PS 15 20 25 CY1H15-PS CY1H20-PS CY1H25-PS Set of left nos. @9, #0, #1, #2, #3, #4 Piston seal NBR CY1H20-PS CY1H25-PS Scraper NBR O-ring

06-rear-e

9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g).

06-reas-e

Contents Bore size (mm) REAS20-PS 20 25 32 40 REAS20-PS REAS25-PS REAS32-PS REAS40-PS @8 @9 #0 #1 #2 #3 #4 Cylinder tube gasket NBR REAS32-PS REAS25-PS Set of left nos.@8, @9, #0, #1, #2, #3, #4 Note) Guide shaft gasket NBR Wear ring A Special resin REAS40-PS Wear ring B Special resin Note) Cushion seal #4 may be difficult to be replaced. Seal kit includes a grease pack (10 g).

Pilot Operated Regulator AR425 to 935 Series

Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

PSxx-OME0003CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

ZMA

13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: M0.35 MPa ZM07M ZM10M Exhaust Characteristics Flow Characteristics Exhaust Characteristics