Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow

Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Parallel I/O: PNP, I/O Cable Length: -, Option: -

Series: 3 (VFA3000), Actuation: 3 (3 Position Closed Center), Body: 40, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: Rc, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 4 (3 Position Exhaust Center), Body: 44, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: Rc, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 2 (2 Position Double), Body: 44, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: Rc, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 2 (2 Position Double), Body: 44, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: T (NPTF), Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 1 (2 Position Single), Body: 44, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: Rc, Pilot Port Direction: P (Lateral)

Series: 3 (VFA3000), Actuation: 2 (2 Position Double), Body: 40, Port Size: w/o Sub-plate, Pilot port: Rc, Thread: Rc, Pilot Port Direction: P (Lateral)

Mounting Method: 1 (Gasket Mounting), Load Capacity: 0 (Standard), Port Size: For Gasket Mounting, Indicator Light: w/o Light, Pressure Display: P (MPa and psi)

Compatible Fluid: Air, Operating Environment: Standard / No Oil, Type: Air Operating Type, Switching Type: [Others] 3-position closed center, Connection Type: -, Plumbing Thread Nominal: -, Driving Type: Pilot Type, Valve Type: Base mounted type / without sub-plate, Pilot port thread type: Rc, Pilot number: -, Number Of Ports: 5, Pilot port direction: Lateral

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output)

Size: 410

Size: 310

Size: 210

Model: 31 (4.4 m³/min), Input/Output: P (PNP, Input, Output)

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: PNP output, Bar length