Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

39

12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

JXCx-OMT0030CN

29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1 ID5 94113 ID1 012 38 - 122 IF IN Data IDIF ID=1 ID=1 bit 7 6 5 4 3 2 1 0 I_Address 32 33 1 LEC1ON 0OFF 2 LEC0OFF 1ON 3 1 LEC1ON 0OFF 4 LEC1ON 0 0OFF 123 IN Data bit 7 6 5 4 3 2 1 0 I_Address 0 ALARM READY 1 2 3 1 0 Bit1 Bit0 0 0 0 1 1 0 39 - 2 READY 1ON 3 ALARM

IDX-OM-W011

IDF6E-**-L IDF8E-**-L IDF11E-**-L IDF15E1-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) IDF Series 10-1 10 1 IDX-OM-W011 10 L 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (22)(27) () () () 2) 3) 10-4 IDF Series 10-3 10 2 IDX-OM-W011 11 M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50

ML1

Note Applicable swich USwitch mounting screw M2.5 X 10 l BMY1-025 D-E73A/76A/80A 25 32 40 USwitch mounting nut USwitch mounting screw M2.5 X 12 l D-M5N/M5P/M5B D-M5NW/M5PW/M5BW D-M5NTL/M5PTL BMY2-025 USwitch mounting nut 4.7-4 Hy-Rodless Cylinder SeriesML1 Cylinder Specifications 25 32 40 Bore size (mm) Guide mechanism Cam follower guide Fluid Air Action Double acting Operating pressure range

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Speed Controller with One-touch Fittings

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 10, 12 8 6 6 10 2 Flow Direction Symbol on Body Tube O.D.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

VP300/500/700

N.O. 112 (55) (X port) (Rc1/8) (R port) Rc 1/2 40 (For mounting) 2-8.5 24 162.2 52 V100 (32) 3(R) 3(R) 3(R) 3(R) 48 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 Y: 172.9 SY 162.2 MAX.10 173.4 163 52 (P port) Rc 1/2 SYJ VK (Pitch) 300 Pg9 119.7 129.7 Pg9 Y: 131.7 148.7 (Non-locking) Manual override 41 37 (Lead wire length) 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 VZ Applicable lead wire O.D

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.

CRJ

9 21.1 8.5 7.5 5.9 12.5 14h9 32 13.5 4.5 7.5 5.5 50.4 30.5 61 180 5 Series CRJ Auto Switch/Proper Mounting Position at Rotation End D-F9 auto switch D-F8 auto switch Size Rotation Rotation range m Actuation range Actuation range B Rotation range m A 90 180 90 180 20.5 23.2 22.4 25.6 16.5 19.2 18.4 21.6 05 40 10 10 20 A A 1 30 10 10 15 For D-F9 Rotation range m: Value of the operating range

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

9 21.1 8.5 7.5 5.9 12.5 14h9 32 13.5 4.5 7.5 5.5 50.4 30.5 61 180 5 Series CRJ Auto Switch/Proper Mounting Position at Rotation End D-F9 auto switch D-F8 auto switch Size Rotation Rotation range m Actuation range Actuation range B Rotation range m A 90 180 90 180 20.5 23.2 22.4 25.6 16.5 19.2 18.4 21.6 05 40 10 10 20 A A 1 30 10 10 15 For D-F9 Rotation range m: Value of the operating range

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160 34.5 44.5 32 20.5 38 32 Refer to page