0.5

30 2 x 3.5 depth 1 4 x M4 x 0.7 depth 6 Variable angle (Female thread mounting) 90 19.5 1.9 (Power supply switch) 6 (With connector plugged in) 37.5 R41 (84) 25 R76 27 Fan Type Ionizer IZF10/IZF10R Series Dimensions IZF21/31 IZF10/IZF10R Technical Data Power supply cable IZF10-CP L 45 2 36 2 Terminal semi-stripped 3 1 7 1 4.3 4 1 Wiring/IZF10 Pin no.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

IDX-OM-O004E

5 . 1 Troubleshooting . 5 1 Chapter 6 References 6 . 1 Specification table . 6 1 6 . 2 Refrigerant with GWP reference . 6 1 6 . 3 Outer dimensions . 6 2 6 . 4 Electric wiring diagram . 6 2 6 . 5 Pneumatic and refrigerant circuits and their functions . 6 3 Chapter 7 Specification for Option A 7 . 1 Safety instructions . 7 1 7 . 2 Specifications . 7 1 7 . 3 Air piping . 7 1 Chapter 8 Specification

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

MHF2

66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (Mounting hole) 32 36 1.2 1.2 36 Finger opening port M5 x 0.8 2-10 +0.1 0 Close: 0 E-E Open: 401 4-M6 x 1 thread depth 6 8-M4 x 0.7 thread depth 4 68 Attachment mounting thread

MHF2

MHF2-16D2 MHF2-16D1 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

Compact Cylinder

-3.0 -1 1 3.5 7 10 9 14 W -2.5 -0.5 1.5 4 7.5 10.5 9.5 14.5 Hs 30 32 35 38 44 49 57.5 67.5 A 15.5 16.5 18.5 17 13.5 14.5 20.5 28.5 B 9.5 11.5 13.5 16 19.5 22.5 21.5 26.5 W -0.5 1.5 3.5 6 9.5 12.5 11.5 16.5 The dimension inside ( ) is for D-A96.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.

1

2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2)

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

MONOSASHI-KUN WITH BRAKE CONTROLLER

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN69 and COM 1Short Circuit between IN69 and COM Set Home When dip switch No.1 is set ON, origins signal is inputted.

Plate Cylinder

Range (mm) Number of auto switches mounted Same surface Different surfaces Bore size 40 6 50 6 63 6 15 1 15 2 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed.

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

FILTER REGULATOR

Recommended torque unitNm Screw M5 1/8 1/4 3/8 1/2 3/4 1 Torque *1 79 1214 2224 2830 2830 3638 *1After tightening the fitting, please tighten 1/6 turns again with the tightening tool. Before using an SMC fitting and S coupler, please referto "Tightening the threaded portion of the connection thread" of the Fittings & Tubing Precautions.

SI unit for DeviceNet TM

No.1 No.2 No.3 No.4 No.5 No.6 1 2 4 8 16 32 0 0 0 0 0 0 0 1 1 0 0 0 0 0 MAC ID 2 0 1 0 0 0 0 62 0 1 1 1 1 1 63 1 1 1 1 1 1 Communication speed setting (switches No. 7 to 8) Set the DeviceNetTM communication speed with a binary code of 125 kbps or 250 kbps or 500 kbps.

240

0 e Lead screw type [mm] r Stroke [mm] q Size w Motor size 6 10 Symbol Motor size Applicable size Nil Basic 6, 10 L Compact 10 Symbol Screw lead LEPY6 LEPY10 K 4 5 J 8 10 Symbol Stroke 25 25 50 50 75 75 y Actuator cable type*1 t Motor cable mounting direction Nil Without cable S Standard cable R Robotic cable (Flexible cable)*2 Top entry Entry on the left side Nil L *1 The standard cable