Rotary Actuator

Applicable shaft types: J, T X = Y = X = Y = Y = X = Y = Y = [mm] [mm] [mm] Size X Y 30 3 to 13 3 to 10 50 3.5 to 27 1 to 20 63 3.5 to 29 1 to 22 80 4 to 38 1 to 25 100 5 to 44 1 to 30 Size X Y 30 3 to 25 3 to 10 50 3.5 to 36 1 to 20 63 3.5 to 41 1 to 22 80 4 to 50 1 to 25 100 5 to 60 1 to 30 Size Y 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A59 Note) Except flange type The rotation

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

SQ1000/2000

list e q w e w y No.

Compact 5-Port Solenoid Valve

Block Connector Connecting Base For the JJ5SY1-10, JJ5SY3-10, JJ5SY5-10 No.

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

4-channel Flow Monitor ( compatible)

0.1 1: 1 2: 10 3: 100 UAC (Accumulated minimum unit for connection product [USEr]) Y U8 0x01 12 R/W (1) Set the accumulated volume per pulse when the user's additional range is selected. 0: 0.1 1: 1 2: 10 3: 100 UPLS (Accumulated volume per pulse for connection product [USEr]) Y U8 0x02 13 R/W (2) 0: L 1: oC 2: Ft 3: GAL 4: F 5: oFF 14 R/W Unit setting (USEr is selected) Y U8 0x00 (0) -80No.PF-OMA1011

Modular Design with Uniform Body Style

e Knob Nil Downward V V V V V Y Upward V V V V V + f Unit Nil Unit on product label: MPa, Pressure gauge in SI units: MPa V V V V V Z*8 Unit on product label: psi, Pressure gauge: MPa/psi dual scale v*10 v*10 v*10 v*10 v*10 ZA*9 Digital pressure switch: With unit selection function *11 *11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options

A

NAM250-N03D 38 172 76 10 NAM350-N04D 12 204 90 10 S Y M B O L S NAM450-N06D 34 225 106 10 NAM550-N10D 1" 259 122 10 NAM650-N14D 112" 361 160 10 NAM850-N14D 2" 473 220 10 Manual and Autodrain types are same overall dimensions.

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Best Pneumatics Vol. 14

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Modular F.R.L. Units

Upward + g Pressure unit Nil Name plate and pressure gauge in SI units: MPa Z*7 Name plate and pressure gauge in imperial units: psi *9 *9 *9 *9 *9 *9 ZA*8 Digital pressure switch: With unit selection function *10 *10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Air Cylinder

M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 CM2 CM2 CM3 With Double Knuckle Joint CG1 (mm) Y(MAX) ND hole H10 Axis d9 CG3 MM JMB MB NX2 L R2 U2 A H Z MB1 CA2 Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 CS1 CS2 Double Knuckle Joint (mm) Y-020B/032B

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

HRX-OM-W002

HRR012/018-A-10-* 45 70 HRR012/018-A-20-* 61 80 HRR012/018-A-20-U 50 80 Model A B In the case of option Z, without bypass valve Fig. 9-1 Outline dimensions (HRR012/018-A-10/20-) 9.2 Outline dimensions HRR Series 9-6 HRX-OM-W002 Chapter 9 Documents 9.2.2 HRR012/018-W-10/20For Option Y(With feet and no Rack Mounting bracket), refer to [6.5 Option Y(With feet and no Rack Mounting bracket).

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

MGG

32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30 40 50 Allowable

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.