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Cassette Case Seal q O-ring Pressure drop (kPa) 10 IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.

CRB2/CRBU2/CRB1

15.5 Goes through Body B side and marked thread 3-3.4 with depth 15.5 Goes through Body B side and marked thread Q (depth) 90 R E (g6) F (h9) A B C D G1 G2 J K L M N P Model Q1 M3 (10) Q2 3.4 (6) Q3 M3 (5) 100 CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

10-SS5Y5-45Stations DC4, N3 C6, N7 C8, N9 10-SS5Y5-45Stations UC4, N3 C6, N7 C8, N9 Button for DIN rail release 26 25 P = 16 (Pitch) 17 26 17 P = 16 (Pitch) 14.5 32 Button for DIN rail release 14.5 32 15.5 31.5 15.5 31.5 R A A A A A R A A A A A B P B B B B B B B B B P Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting Applicable tubing O.D.: 10, 3/8" (P , R port) One-touch fitting

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ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Air Cylinder

3/8 21 130 40 204 100 10 26 M26 x 1.5 23 100 1/2 21 130 40 204 D-X Technical Data 347 CBG1 Series Basic with Rubber Bumper: CBG1BN Rod end lock: CBG1BN Bore size Stroke Rl GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114)

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Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical Mounting, Ball Bushing Bearing r Over 40 mm stroke e 35 mm stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed.

Air Cylinder

, Non-rotating rod type (except single acting type)) (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-G39A D-K39A D-A3lA D-A44A CJ1 D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-C7/C8 D-C73C D-C80C D-B5l D-B64 D-B59W CJP CJ2 A B A B A B A B A B A B A B A B 20 11 9.5 7 5.5 1 0 6.5 5 3 1.5 7.5 6 1.5 0 4 3 25 10 10 6 6 0 0 5.5 5.5 2 2 6.5 6.5 0.5 0.5 3.5 3.5 32 11.5 10.5 7.5 6.5 1.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M3 M5 1/8 4 6 8 N3 N7 N9 10-SYJ3000 Body ported Base mounted 10-SYJ5000 Top 10-SYJ7000 Side 10-SYJ3000 Bottom Side 10-SYJ5000 Bottom Side 10-SYJ7000 Bottom Body ported Type 21P A, B port P port Individual SUP spacer assembly R port Base mounted P port P Type 32P R port A, B port R port A, B port P port Mixed mounting of 3 port valves and 4, 5 port valves Individual EXH spacer assembly

Stability of suction position,

with groove ZP3E-Y100BMJB ZP3E-Y80BMJB Width across flats 30 Width across flats 17 Width across flats 30 Width across flats 17 Bushing Bushing 52.1 A B 50 8 8 Rc1/8 42.6 A B 50 8 8 Bushing Rc1/8 Bushing M22 x 1.5 M22 x 1.5 M16 x 1.5 D-D D-D M16 x 1.5 28 Seal washer 28 Seal washer 24 D D 24 77.8 60.1 D D 12.5 68.6 22 12.5 59.1 18 Width across flats 10 85 80 57 10 106 100 71.5 10 Width across

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

coil Station 20 Station 10 Common (+) Common (+) A side coil () B side coil () A side coil () B side coil () A side coil () B side coil () A side coil () B side coil () A side coil () B side coil () EVS A side coil Light/Surge voltage suppressor Light/Surge voltage suppressor VFN Connected on the printed board Connected on the printed board Common () Common () Station 4 Station 3 Station

LEC-OM02704CN

39.0 23.8 5.2 B 12.7 A B C D E F 10126-3000PE 10326-52A0-008 25.8 37.2 14.0 10.0 12.0 31.3 AWG2430 11 4 11 (2) SCR(3M()) 36210-0100PL 36310-3200-008 39.5 34.8 22.4 11.0 11 5 12 12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300

MG

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

Proposals for Energy Saving

TRBU 10 75 B 100 Roll length Inner tube O.D. Symbol 20 100 Length 20m roll 100m reel Double layer construction using flame resistant resin for the outer layer. Inner tube I.D.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Motor Brake Series LXP Dimensions/LXPB2BD Scale: 30% The dimension inside [ ] shows the location at which the home position switch operates. 9 10 [16.5] 10 21.5 4-M6 x 1 depth 10 Section C 18 7.5 Section F B 4-M6 x 1 4.5 1 30.5 34 47.5 4-9.5 4-5.6 +0.1 0 8.4 5.4 34 0.02 78 91 94 64 50 10 B 4H9 +0.030 0 depth 6 26 63 73 30 D Stroke + 181 (Stroke: 50 to 100 mm) Stroke + 198 (Stroke: 125 to

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 9kg Positioning time (sec) Positioning time (sec) 150 100 50 10 1 150 100 50 10 1 Positioning distance (mm) Positioning distance (mm) 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 3.1 2.1 1.1 0.3 0.1 3.1 2.1 1.1 0.3 0.1 100 100 1.6 1.1 0.6 0.2 0.1 1.6 1.1 0.6 0.2

Cylinder with Lock

F 6 CP96N/C96N Series Selection Graph Graph b Graph x 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa