VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

PFxx-OMJ0005CN

2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693

modular-press-e

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Modular F.R.L. Pressure Control Equipment

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

3 Port Solenoid Valve Series SYJ300/500/700

(Example) SS3YJ3-20-03 . 1 set (manifold base) SYJ312-5LZ-M3 . 2 sets (valve) SYJ300-10-1A . 1 set (blanking plate assembly) SS3YJ3-42R-03-C4 . 1 set (manifold base) SYJ314R-5G . 2 sets (valve) SYJ300-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 04 (4 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C4 (One-touch Fitting for Ø4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Series: 10-SV1000, Base Type: 10FD, Connector Entry Direction: Upward, Valve Stations: 4 Stations, P, E Port Location: U Side, 2-10 Stations, Pilot Type: Internal Pilot, A, B Port Size: One-touch Fitting for Ø4, Mounting: DIN Rail Mounting w/o DIN Rail

Series: 10-SV1000, Base Type: 10FD, Connector Entry Direction: Upward, Valve Stations: 10 Stations, P, E Port Location: U Side, 2-10 Stations, Pilot Type: Internal Pilot, A, B Port Size: One-touch Fitting for Ø4, Mounting: DIN Rail Mounting w/o DIN Rail

Series: 10-SV1000, Base Type: 10FD, Connector Entry Direction: Upward, Valve Stations: 5 Stations, P, E Port Location: Both Sides, 2-20 Stations, Pilot Type: Internal Pilot, A, B Port Size: One-touch Fitting for Ø4, Mounting: DIN Rail Mounting w/o DIN Rail

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C4 (One-touch Fitting for Ø4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 05 (5 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: C4 (One-touch Fitting for Ø4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 7 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 7 Stations, SUP/EXH Block Mounting: D Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

19 218 210 19 Series SYJ3000 C4 N3 Type 46 Manifold: Side Ported/SS5YJ3-46Stations -M5, [ ]: AC Approx. 300 (Lead wire length) C4 N3 Grommet (G) For M5 For (Built-in one-touch fitting) (Pitch) P = 10.5 14.5 1/8 (P port) 10 Manual override 1/8 (P port) 10 59.9 [62.1] 60.7 [62.9] 34.9 78.8 [83.2] (4.4) 18.9 91.7 [96.1] B B B B B 38.5 8.8 37.7 35 3.3 P P 19 A A A A A 10 2-4.5 (For mounting