2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V*3 ZS-33-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Fieldbus System

Note 10) When Without SI Unit (SD60) is specified, With DIN rail (D) cannot be selected.

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

5 Port Solenoid Valve, Series VQC

block box N3 (for 5/32") N7 (for 1/4") N9 (for 5/16") C8 (for 8) C10 (for 10) C12 (for 12) N7 (for 1/4") N9 (for 5/16") N11 (for 3/8") Rc 1/4, Rc 1/8 (NPT, NPTF, G) S Kit: Serial transmission ( ) 4150 (9.15) T Kit 1 to 10 stations S Kit (without unit) Solenoid weight is not included.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

SYJ300/500/700

(Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (MO): SYJ72-WO-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 89.6 16.1 46.2 31.1 M8 x 1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7]

Table of Contents

How to order manifold VV5Q13 1(P), 3(R) port size: 1/4 08FSO DN 00T P How to order valves VQC VQ1130 5 N7 Cylinder ports Example) VV5Q13-09FS0-D K S SQ Applicable tube O.D. (Inch) 1/8" 5/32" 1/4" N1 N3 N7 Symbol VQ0 DIN Rail Mounting Others, option symbols: to be indicated alphabetically. VQ4 Each manifold can be mounted on a DIN rail.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-M-M5 DIN terminal (D): SYJ5220-D-M5 M8 connector (W0): SYJ5220-W0-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23

7ND9071en

T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 24 V II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

Intrinsically Safe Valve

Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order Valve 5 2 LL 3 SY 53 40 UL/CSA compliant Manual override Nil D E Non-locking push type

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

VQC

(1/4") VQC101 1.0 0.65 Metal seal Rubber seal C10 (for 10) VQC200 C4 (For 4) C6 (For 6) C8 (For 8) 2.6 2.0 N11 (3/8") Series VQC2000 to 80 In case of branch type C12 (for 12) N13 (1/2") N3 (5/32") N7 (1/4") N9 (5/16") VQC201 3.2 2.2 C8 (For 8) C10 (For 10) C12 (For 12) ^{Metal seal Rubber seal VQC400 Rc 1/2 6.9 6.3 N7 (1/4") N9 (5/16") N11 (3/8") (NPT, NPTF, G) Series VQC4000 to}

PFxx-OMJ0005CN

2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

: Internal Pilot Specifications, Applicable valve: SV2000, P- and E-port entry position: U-side (2 to 10 series), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 8