MB

6 6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17

MGG

25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49 110 (118) 11 106 52.5 38.3 238 44 62 12 (15) 25 53 121 (130) 11 123 58.5 44.5 285 55 75 14 (16) 26 59 137 (149) 16 140 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

Modular F.R.L. Unit

AKM2000 1/8, 1/4 40 40 28 11 11 AC20, AC20A AKM3000 1/8, 1/4 53 48 34 14 13 AC25, AC25A AC30, AC30A AKM4000 1/4, 3/8 70 54 42 18 15 AC40, AC40A Note) How to Order Note) Not applicable to AC40-06.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 x 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 756 Electric Actuator/Guide Rod Type LEYG Series AC Servo Motor

HRX-OM-X037

. 9-1 9.1.2 HRL100/200-W-40 . 9-3 9.1.3 Refrigerant with GWP reference. 9-5 9.1.4 Communication specifications . 9-5 9.2 Dimensions . 9-6 9.2.1 HRL100-A-40 . 9-6 9.2.2 HRL200-A-40 . 9-7 9.2.3 HRL300-A-40 . 9-8 9.2.4 HRL100/200-W-40 . 9-9 9.3 Flow Diagram . 9-10 9.3.1 HRL-A-40. 9-10 9.3.1 HRL-W-40. 9-11 9.4 Cooling Capacity . 9-12 9.4.1 HRL100A40 CH1 . 9-12 9.4.2 HRL200A40 CH1 . 9-12 9.4.3

Support Guide/11-LEFG Series

Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

MNB

39 46.5 31 38 31 34.5 31 33.5 87 77 41 34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5

MNB

39 46.5 31 38 31 34.5 31 33.5 87 77 41 34 43.5 34.5 50 CLS 44 51.5 36 43 36 40 36 39 93.5 83.5 46 39 48.5 39.5 63 51.5 58 45 52 45 48.5 45 47.5 103 92.5 52.5 46.5 55 46.5 80 CLQ 60.5 65.5 53.5 60 53.5 56.5 53.5 55.5 113.5 103 59.5 55 62 55 100 MLGP Operating Range RLQ Auto switch model Bore size (mm) 32 40 50 63 80 100 7.5 MLU D-Z7/Z80 10.5 11 15 11 9.5 11 14 11 9.5 11 14 11 7.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

40-lMll-M5 3 4 5 3 4 5 L plug connector (L): SYJ3 40-lLll-M5 VQD VZS VFS 33.5 16.5 33.5 16.5 2-3.2 (Mounting holes) 2-3.2 (Mounting holes) 22 3 22 3 VS 2.5 2.5 A B A B 11 11 17.5 17.5 VS7 A B A B 47.4 50.7 33.7 300 111.6 39.2 [40.5] (Lead wire length) 92.3 [94.9] (Lead wire length) 52.6 [59.1] 300 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 X 0.8 (

SYJ3000/5000/7000

Type SS5YJ7-41 Type SS5YJ7-42 Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

PF2A/PF2W

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Modular F.R.L. Unit

Threads for IN and OUT ports are not machined. 40 40 28 11 11 AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 1/8, 1/4 AKM2000 53 48 34 14 13 1/8, 1/4 AKM3000 70 54 42 18 15 AKM4000 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

JXCx-OMU0004

CCW [CCW] 11() 2 22 =() 34 48 11() 3 22 =() 34 48 * 10.

Series SV

(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

35 32 1/2 66 34 80 125 38 6.5 140 112 35.5 35 15 18 170 112 200 27 19 16 M14 x 2 27 30 34 M27 x 2 35 32 1/2 77 34 80 160 42 9 174 140 45 38 17 20 205 140 240 36 22 18 M16 x 2 28 34 38 M33 x 2 40 36 3/4 94 43 100 (mm) Without rod boot With rod boot Bore size (mm) S l T V W H ZZ e f h Z 40 106 11 7.5 8 66 182 55 25 92 208 50 112 11 10 9 73 195 60 28 99 221 1/4 stroke 63 116 11 12 10 80 208