Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

LEKF-OMZ0035

AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310

AC Servo Motor Driver (CC-Link Type)

250 143 1000 500 250 Different from the initial value. *5.

MY2

Calculation of Guide Load Factors 1 Operating conditions Mounting orientation Cylinder MY2H40G-500 Average operating speed a 300mm/s Mounting orientation Wall mounting 1. Horizontal mounting 2. Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

2/3 Port Valve

15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320

Air Cylinder

M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 400mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 600mm

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: R (Right)

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 600mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting:

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.