3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

100

Supply valve Circuit diagram (300) 67 [69.2]1 Manual override Specific Product Precautions 35 (175) 28.6 [35.6]1 7.7 214 [221]1 185.8 *1 [ ] for AC * Tighten to the recommended torque on pages 10 and 11 to mount the body.

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

MXS

0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: 6N

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: 6N

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: 6N

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 400mm, Motor Option: w/Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor, Step

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor

Vacuum System Peripherals:

) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Fieldbus System

Bottom Ported How to Order Manifold SS5Y S6 10 3 Q C6 2 05 U Refer to the SY3000/5000 series catalog (CAT.ES11-103) for Type 11/Bottom ported dimensions.

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) + + + + R port P, E port R: External pilot style H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector -+ + SYJ52R is only for manifold use.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

> 4.1 [46] [54.5] 22.5 1 32 P P 5.5 B B A B A B A B A B 4.7 35 23.5 44.4 <45.1> 10.2 26 3 R R A A G: Approx. 300 H: Approx. 600 lead wire ( length ) (Pitch) P = 10.5 13.5 24.3 33.2 (M5 port) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 2n1-M5 x 0.8 (ports A, B) L2 [rail mounting hole pitch 12.5] (5) L1 DIN rail holding screw DIN rail (VZ1000-11-1-) L type plug connector M

Solid State Auto Switches

Connector size M12 Indicator light 4.8 Applicable to 300 mm pre-wired connector 14 6 29 300 42.5 11 1 (g) Weight Note) A white color heat shrink tube is attached to the D-P3DWSE type only. 10.5 Most sensitive position Heat shrink tube Note) D-P3DWSC D-P3DWSE Auto switch model Lead wire length (m) 0.3 23 Auto switch mounting bracket (For round groove mounting: BQ6-032S) Auto switch mounting

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For response time, refer to the graph below. 400 350 Response time (ms) 300 250 200 150 100 50 0 1 2 3 4 5 6 7 8 9 10 11 12 * This graph shows delay times between gateway unit and controllers. Fieldbus network delay time is not included.