Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

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/110 VAC (50/60 Hz) DC: 1 W (With light: 1.2 W), 100 VAC: 1.4 W (1.45 W), 110 VAC: 1.45 W (1.5 W) Air Operated Valve Specifications Refer to page 13-4-11 for dimensions.

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to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

CL

160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L1 FV L FT FX FZ FD M B 36 46 43.5 53.5 53 63 A B 63 18 9 108 9 60 80 92 43.5 64 46 33.5 M10 x 1.5 14 63 80 20 11 134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

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VAC, 100 VDC or less.

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2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

ISO Cylinder

24 22 11 13 12 24 25 22 M22 x 1.5 8 G1/8 16 22 8 50 20 10.2 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85 (88.5) 101 (104.5) 115 (118.5) 16 66 (69.5) 92

CM2

One-touch fitting Basic Front flange Built-in One-touch fitting Spring return CM2F20SCM220A, #11 SCM220A, #11, #4 SCM220A, #11, #4, #19 CM2F25SCM225A, #11 SCM225A, #11, #4 SCM225A, #11, #4, #19 CM2F32SCM232A, #11 SCM232A, #11, #4 SCM232A, #11, #4, #19 CM2F40SCM240A, #11 SCM240A, #11, #4 SCM240A, #11, #4, #19 Bore P Q 20 6 23 25 6 26 Basic Front flange Built-in One-touch fitting Spring extend

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

19 73 214 M16 x 1.5 25 22 18 7 14 68 209 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 83 236 M20 x 1.5 30 27 22.4 9 19 78 231 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 100 262 M24 x 1.5 35 32 28 11 24 90 252 0.030 0.076 0.18 0.3 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 119 301 45 42 35.5 13 30 104 286 M30 x 1.5 0.030 0.076 0.036 0.090 100 100 80 65 M48 x 1.5 75 72 56 16 50 143 333

LEC-OM02704CN

39.0 23.8 5.2 B 12.7 A B C D E F 10126-3000PE 10326-52A0-008 25.8 37.2 14.0 10.0 12.0 31.3 AWG2430 11 4 11 (2) SCR(3M()) 36210-0100PL 36310-3200-008 39.5 34.8 22.4 11.0 11 5 12 12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

Air Cylinder

50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188 With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125

C85

32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

2-color indication With timer Grommet 20D-A59W Tie-rod Grommet 11-11-17 D-F79/F7P/J79 11-11-18 Grommet D-F7NV/F7PV/F7BV 11-11-19 Rail D-J79C 11-11-20 Connector 11-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector

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43.3 10 13.2 18.5 39.3 17 55 21 59 31.8 1/4" AS321F-03-09 AS321F-03-12 29.5 15.2 41 18.5 57 44.3 12 20.9 46.5 41.5 40.2 35.2 20.9 22 61 32.8 23 5/16" 3/8 AS321F-03-11 AS421F-04-10 31.8 47.9 10 17.9 18.5 43.3 21 59 21 100 33.6 3/8" 24 (23.8) 24 (23.8) 1/2 28.6 25.4 57.6 42.1 49.6 50.1 AS421F-04-11 AS421F-04-12 33.6 17.9 48.9 12 47.9 21 20.9 100 22 101 34.6 3/8" 28.6 50.1 42.1 25.4 57.6 49.6

CL

160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.