Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

MU

13 17 19 CI 17 22 27 32 38 DF 4 7 10 12 14 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 DB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

CXS

13 Series CXS Horizontal Mounting 10 to 32 Graph (13) V = Over 400 mm/s; Up to 30 st Graph (14) V = Up to 400 mm/s; Up to 50 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 25 0.1 25 20 0.05 20 15 15 10 0 0.01 0 0.1 10 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Stroke Reading Cylinder and Counter

Operating Range (mm) Auto switch model Bore size (mm) 9.5 9.5 11.5 12 20 32 40 50 63 D-A9(V) 7 9 9.5 D-M9(V) D-M9W(V) D-M9A(V) 2.5 4 6 6 6 6.5 D-A7(H)(C) D-A80(H)(C) 9.5 12 12 11 10 12 D-A79W 11.5 13 13 14 14 16 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V) D-F7NT D-F79F 4 5.5 6 6 6 6.5 D-X Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

LEC-OM02904

13.3 . 5 13.4 . 5 13.5 . 6 13 1 13. 13 13.1 13.11

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1 4, 2 (P A, B) 4, 2 5, 3 (A, B EA, EB) Bore size Positions C 13 16 13 16 13 15 13 16 13 15 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 Cv 3.0 4.0 3.0 4.0 3.0 3.5 3.0 4.0 3.0 3.8 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.10 Cv 4.0 4.4 4.0 4.4 4.0 3.7 4.0 4.0 4.0 4.4 C 18 18 18 18 18 15 18 16 18 19 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal

V

7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K 8 6 6 5 N I ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 45 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25 M10 x 1.25

High Vacuum Angle Valve, XL Series

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 14 16 17 18 21 22 24 13 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How to Order Double

XL

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release