Table of Contents

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

VQ7-6/7-8

Exhaust center : VQ7-6-FJG-D Pressure center : VQ7-6-FIG-D 50 50 68.5 76.5 145 86.5 155 50 50 68.5 13 (port B) 13 (port A) 13 (port B) 13 (port A) Manual override Manual override B A B A B B 38 50 62 38 50 62 Indicator light R1 P R2 R1 R2 Indicator light 2-6.5 Mounting hole 2-6.5 Mounting hole 42.5 42.5 42.5 42.5 G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 125.5 137.5 125.5 137.5 37 93

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Speed Controller with One-touch Fitting

Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

OMU0023

INP = 1 indicates that the target location has been reached. 12 Repeat steps 9-10 After settling time, the operation of step data No.20 is 13 completed. 14 01 10 9103 0002 04 0 2710 01 10 9103 0002 Step Data No. 20 target position changed to 10 mm.

MGG

11 12 13 40 and larger are the same as number 6.

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

SYJ3000/5000/7000

M plug connector (M): SYJ3240-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 98.6[103] 79 [83.4] R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 96.8 28 28 69 28 82 14 14 14 5 5 5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-12 13 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 3 Position Closed Center/Exhaust

CXS

8 9.5 C0.5 6.2 2 10 9.5 7 8 28 0.1 M8 x 1.25 10 2 11 6.6 +0.2 0 + 0.2 0 10 0 0.2 CXS25 +0.019 +0.001 0.05 0.15 +0.3 0 6 M6 x 1.0 12 8.5 9.5 C0.7 6.2 2 12 11.5 7 10 35 0.1 M8 x 1.25 12 2 11 6.6 Made to Order +0.4 0 +0.019 +0.001 13 +0.2 0 0 0.2 CXS32 + 0.2 0 0.05 0.15 8 M8 x 1.25 12.5 11 13.5 C0.7 8.2 2 16 15.5 8 13 44 0.1 M10 x 1.5 16 3.5 14 9 Notes) Dimension tolerances that are not indicated

C95

86 91 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 13 14 15.5 16.5 19 19 M6 M6 M8 M8 M10 M10 6 6.5 8 8 10 10 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

Integrated Controller

0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 10 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS25HH/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 2.5 16 14 12 10 8 6 4 2 00 200 400 600 800

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

SYJ300/500/700

22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

HRX-OM-X071

13 Power supply Single-phase 200 to 230VAC 50/60Hz Allowable voltage range +/-10%13 3-phase 460 to 480VAC (60Hz) Allowable voltage range +4%, -10%13 Circuit protector A 20 10 Applicable earth leakage breaker12 Rated current20A Rated current10A Electrical Sensitivity current30mA Sensitivity current30mA system Cable Qty x size(Inculding ground) 15 3core12AWG(3 core3.5mm2) 4core14AWG(4 core2.0mm2