CM2

(Refer to Data on p.0-21.) Refer to p.5.4-1 for made to order specifications for series CM2.

HRX-OM-S004

Y strainer (40 meshes) 20A 1pc. Barrel nipple 20A 1pc. Drain pan for the pump 1pc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 16 +0.3 +0.1 38 M14 X 1.5 12 22 24 55 13 25 55.5 3 X 18l Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 27 28 60 15 27 55.5 3 X 18l Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 37 36 71 19 28 76.5 4 X 25l Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 37 40 83 21 38 4 X 30l 83 Knuckle pins

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

2 r u i e y !4 !5 r i e y !4 !5 q AS ASP ASN !7 !0 q !1 t o AQ !0 u !1 t o !7 ASV AK Component Parts Description Material Note Description No. Note Material No. ASS NBR U seal Body A PBT q !1 NBR U seal Elbow body PBT w !2 ASR POM, Stainless steel (3) Cassette Handle Black PBT (1) e !3 NBR Seal Body B Electroless nickel plated Brass r !

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

MGC

42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20 47 12 25 M8 x 1.25 38 60 125 95 70 40 Rc1/8 20 241 104

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

Environment

1 y i o !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

HRX-OM-W032

Connection port Sealant Note: When using the Y strainer of the accessory, fasten it on the return port. Clean the filer of the strainer after the trial operation before starting the proper operation Sealant Barrel nipple 25A Y strainer 25A Arrow direction of Y strainer Connect the strainer so that the screen faces downward.

Table of Contents

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

NCA1

/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 250 (2.5) 1 21/32 1.64 2.19 2 3/8 3/8-16 19/32 1 1/4 325 (3.25) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 1/2 400 (4) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 3/8 37 Series NCA1 Medium Duty Air Cylinder Adjustable Stroke Return Specifications Bore size (inch) 1.5 2 2.5 3.25 4 Media Max.

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.