Environment

0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 LER 90 50 80 Lead 4: LEY32C LEH 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 4: LEY32C LEY -X5 60 Lead 8: LEY32B 30 50 11LEFS 40 20 21 Lead 8: LEY32B 30 11LEJS Lead 16: LEY32A 20 10 Lead 16: LEY32A 10 25A0 0 0 300 200 400 100 500 600 0 300 200 400 100 500

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

ZP

Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP

CP95

7. 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

CP95

CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 Seal kits consist of items !3 to !

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

RHC

speed Vmax (mm/s) Data Maximum Energy Absorption Maximum energy absorption (J) 20 25 32 40 50 63 80 100 Bore size (mm) 7 12 21 33 47 84 127 196 10-6-5 5 High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63, 80, 100 How to Order RHC 20 H7BW B Number of auto switches Mounting style Nil S n 2 pcs. 1 pc. n pcs.

MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-07ST 17 1/4" 13.2 27.8 39.3 29.5 41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2

VZ100/300/500

Note Mounting screw (M3 x 6) For valve unit (R port), Noise reduction: 21 dB or more, Effective area 5 mm2 Model Description Note) At rated voltage With foot bracket DXT170-34-1A Operating Pressure AN120-M5 (8 x 17l) Silencer M5 Note) Vacuum specifications (MPa) 1 (P) port R port 27 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0.4 Operating pressure range (MPa) 0 to 0.7 Type of actuation

VZS

VAC, 100 VDC or less.

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

-1A Blank plate ass'y SYJ3000-21-2A Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SYJ3000-33 -2 (M1.7 7, Non-gloss nickel plated) Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) A A Blank plate SYJ3000-21-1 Manifold gasket

2/3 Port Valve

Refer p.4.1-20, 4.1-21 for specifications and models.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

100 100 125 125 Vacuum entry B01 N01 T01 Rc NPT NPTF 1 8 Pad type 1 8 HB Large bellows pad 1 8 Material N NBR S Silicon rubber U Urethane rubber F Fluororubber E EPR 1209 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 1/8 (Rc, NPT, NPTF) I I 1/8 (Rc, NPT, NPTF) Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 45 Width

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.4-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 90 10 80 75 1 Replacement Dif. sides

ZP

138 ZPTB40-0-A10 171.5 70.5 185.5 66.5 170.5 173 174.5 69 174 77 ZPTB50-0-A10 76.5 180.5 181.5 183 184 79 80.5 184.5 185.5 13-11-20 21 Series ZPT Vacuum Pad: Vertical Vacuum Entry with Buffer Connection One-touch fitting (Buffer) Pad Form Bellows Vacuum Entry Port Vertical Mounting Buffer body Bellows 20, 25, 32 Bellows 40, 50 Applicable tubing O.D.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

-1A Blanking plate assembly SYJ3000-21-2A Round head combination screw SY100-33 -2 (M1.7 x 7, matt nickel plated) Blanking plate SYJ3000-21-1 Steel ball is driven in.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

3 Port Air Operated Valve Series SYJA300

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.