VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

51

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[131.4] Approx. 300 83.4 75.9 64.6 Max. 10 145.2 65.4 35.2 50.6 [57.6] 49.5 55.1 37.6 M8 x 1 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 107.4 [111.8] 97.4 28 18 18 18 18 28 18 18 28 18 18 28 125.2 110.4 147 9.5 22 9.5 22 22 9.5 22 9.5 Note) Refer to page 176 for dimensions of connector types. 65 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 3 position closed

Table of Contents

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

V100

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

MGP

22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 50 80 M8 X 1.25 M10 X 1.5 M10 X 1.5 M12 X 1.75 M14 X 2.0 3.17-3 Compact Guide Cylinder Series MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Compact guide cylinder M 25 30 Z73 MGP Number of auto switches Compact guide cylinder 2 1 S Bearing M L Slide Ball bushing Auto switch Without auto switch (Built-in

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

One-touch Fittings

X 10 Y 12 1/4 KQ2H12-02GS 19 17.2 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03GS 19 17.2 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04GS 22 22 18.2 22.3 15.9 17 58.3 58.3 9 37.7 Applicable tubing O.D.: 4, 6 16 3/8 KQ2H16-03GS 24 22 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04GS 24 22 23.6 32.1 25.7 20.6 113 67 13 44.6 *1: D is the body diameter. *2: Reference dimensions after installation

Miniature Fittings M3, R(PT) 1/8, M5 Series M

10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.

Electric Actuators

1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style

Battery-less

20.5 20 8 17 38 23.5 M14 x 1.5 32, 40 22 20.5 25 8 22 42.0 23.5 M14 x 1.5 Refer to the Web Catalog for details on the rod end nut and mounting bracket.

REC

19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 146 204 M26 X 1.5 32 M10 X 1.25 150 to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 159 217 M32 X 2 40 M14 X 1.5 200 to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot G H F G Width across flats B2 2-Rc(PT)P K A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving

CXWM/CXWL

23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.

smcmaintenancepartslist

CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.

REC

19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 1/8 146 204 32 M10 x 1.25 M26 x 1.5 Up to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 1/8 159 217 40 M14 x 1.5 M32 x 2 Up to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C