Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Compact Cylinder with Air Cushion

22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32 100 I-G10 M26 x 1.5

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

MTS

) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47)

Prevents Micro-Bubbles

P. 17-5-35 Special Tools 17-5-6 4 Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) VC LVC 2 0 06 S VDW Option VQ Body class Nil 1 2 3 4 None With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 VX2 Valve type 0 1 2 N.C. N.O.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

CHKD/CHKG

CHS CH2 Minimum Auto Switch Mounting Stroke CHA (mm) Related Products D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number DD-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4.5 4.5 4 7 5 5.5 7.5 11 D-Y59/Y69 D-Y7/Y7V

Solid State Auto Switches

Weight (g) D-B53 D-B54 D-B64 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 22 78 126 22 78 126 22 78 Lead wire length Dimensions (mm) 33 13 4 SMC 15 12 Indicator light D-B64 without indicator light 6.5 6.5 14.3 9.5 Most sensitive position 15.5 4.5 1632 Reed Auto Switch Band Mounting Style D-C73C/D-C80C Refer to SMC website for the details of the products conforming to the international standards

Series IDG

to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6

Wedge Cam Operation Gripper Series MHK2

as bleed port. 7 18 2.3 M5 X 0.8 (Finger opening port) MHKL2-16 Long stroke model / 14 2-M4 X 0.7 thread 5 deep 22 3H9 3 deep +0.030 0 17H9 1.5 deep +0.043 0 2-M4 X 0.7 thread 8 deep 4-M4 X 0.7 thread 8 deep Bottom port dia. 3.4 through-hole 0 -0.1 5 Open 28.6 +1.2 0 4 10 12 0.02 22 56 54 34 24 0 -0.2 28 Closed 14.6 3H9 3 deep +0.030 0 15 38.5 15 63 23.6 0.05 83 4-M3 X 0.5 (Attachment mounting

Air Cylinder Series MB

M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.

NCA1

4 7/8 2 5/8 5 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 5 1/4 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 5/16 5 1/8 2 7/8 5 1/4 5 1 3/8 1-14 1 5/8 2 3/8 1 2 9/16 5 1/8 2 7/8 5 1/2 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 13/16 5 1/8 2 7/8 5 3/4 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 5 7/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5

RQ

22 42 14 30 12 14 16 30 12 14 36 41.6 10 18 42 0.3 0.5 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 IY-G05 22 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 IY-G10 32 M26 x 1.5 M26

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

HRX-OM-R005

completion of preparation (TEMP READY) . 5-19 HRS Series HRX-OM-R005 Contents 5.8.2 Signal for completion of preparation (TEMP READY) setting / checking . 5-20 5.9 Offset function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Offset function setting and checking . 5-24 5.10 Function to recover from power failure . 5-26 5.10.1 Function to recover from power failure . 5-26 5.10.2 Function to recover

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

HRX-OM-O021

completion of preparation (TEMP READY) . 5-19 HRS Series HRX-OM-O021 Contents 5.8.2 Signal for completion of preparation (TEMP READY) setting / checking . 5-20 5.9 Offset function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Offset function setting and checking . 5-24 5.10 Function to recover from power failure . 5-26 5.10.1 Function to recover from power failure . 5-26 5.10.2 Function to recover

CJ2

4 9 5 11 4 8 5 C85 C95 CP95 5 5 NCM Since this is a guideline including hysteresis, not meant to be guaranteed.