Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.
TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06
30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
Foot Refer to page 5 for accessories Without auto switch With auto switch Without/with auto switch Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to
M27 X 2 10 11 14 20 20 27 16 19 24 34 34 42 40 50 64 80 80 10 10 14 22 22 25 10 10 14 22 22 25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 12.5 16.5 23.5 23.5 100 119 28.5 Combinations of Support Brackets Available combinations Refer to below picture together.
EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F
Diaphragm 100 0.69 Hastelloy C-22 Hastelloy C-22 PCTFE (Option: PEEK, PTFE) 316 SS 316 SS PCTFE (Option: Vespel, PEEK, PTFE) 90 0.62 80 0.55 Seat Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 60 0.41 Dimensions inch (mm) 50 0.34 40 0.28 AK1000 30 0.21 2.12 (53.8) 20 0.14 0 10 0.00 0.07 Max. 5.0 (127.0) Max. 5.6 (142.2) (When selecting AK1050 and the panel mounting option) 0 100
300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.
Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.
400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]
No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%
142 22 70 19 72 3 50 5 40 245 (311) 8 0 0.036 13 CRA1BSU100 12.5 112 3/8 25 25 40 M24 x 1.5 73.5 28 16 22 172 22 85 19 85 4 60 5 45 ( ) are the dimensions for rotation of 180 and 190. 11-7-27 28 Series CRA1U Size 50, 63, 80, 100 Single shaft with four chamfers: CRA1BXU Double shaft with four chamfers: CRA1BZU Double shaft key: CRA1BYU (mm) (mm) (mm) l 25 30 40 45 U 89 105 130 156 UU 109
Note) Other dimensions are the same as the single shaft. 11-7-22 23 Series CDVRA1 Rotary Actuator with Auto Switch, with Solenoid Valve Rack & Pinion Style Size 50, 63, 80, 100/Basic Style: CDVRA1BS50 to 100 Single shaft type: CDVRA1BS50 to 100 Auto switch D-A53 (Opposite side 4 locations) Double shaft type: CDVRA1BW CRB2 CRBU2 CRB1 MSU Port size (Opposite side) (Single solenoid) CRJ Courtesy
x 1.5 59 16 4.2 57.5 26 112.5 6 11 12.5 98 106.5 53.5 depth 15.5 depth 13.5 75, 100 115 53 10 to 50 Rc 1/8 19.6 17.5 Rc 3/8 23 100 12 2 27 30 50 M20 x 2.5 156 27 94 M10 x 1.5 73 16 4.2 67.5 26 132.5 6.5 11 13 125 63 117 125 63 depth 15.5 depth 13.5 75, 100 9-10-22 22 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Dimensions: 63, 80, 100 Foot Style Foot style: CLQL/CDLQL L
T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.
Model determination 22 Series REAS Model Selection 2 Max.
Changes from the standard type are: S SH 316L SS Electropolish + Passivation Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat Hastelloy C-22 316L SS AZ1202 AZ1206 AZ1210 AZ1215 AZ1225 Option Other Parameters Hastelloy C-22 316L SS HF Cv 1.1 Supply pressure effect 4.2 psig (0.029 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop PCTFE (Option: Vespel)
L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.