Pulse Valve

), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

VXP21/22/23

steel, Brass FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Stainless steel, Brass, NBR Stainless steel, Brass, NBR Disk assembly Disk assembly r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A

VXD21/22/23

FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Diaphragm assembly Diaphragm assembly Stainless steel, Brass, NBR Stainless steel, Brass, NBR r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A to

Fluoropolymer Piping Equipment

-T-R10 LQ1E22-T-R11 LQ1E31-T-R1 LQ1E31-T-R2 LQ1E31-T-R8 LQ1E31-T-R9 LQ1E32-T-R1 LQ1E32-T-R8 LQ1E32-T-R9 LQ1E32-T-R10 LQ1E41-T-R1 LQ1E41-T-R2 LQ1E41-T-R3 LQ1E41-T-R8 LQ1E41-T-R9 LQ1E51-T-R8 LQ1E61-T-R1 8 x 6 10 x 8 12 x 10 6 x 4 8 x 6 10 x 8 12 x 10 8 x 6 6 x 4 12 x 10 19 x 16 6 x 4 10 x 8 12 x 10 19 x 16 10 x 8 8 x 6 6 x 4 19 x 16 25 x 22 25 x 22 19 x 16 Body size (according to the combination

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, Calibration Certificate

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

New

t r w r w e e VXF26C<t y t w w r r e q e q VXF26D<t t y r w r w e q e q Component Parts Component Parts No.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Lightweight and Compact

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 74 C O N T E N T S HRS090 Series Standard Type HRS HRS

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -