Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Series: 25A-ISE20, Rated Pressure Range: CH (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specifications: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

LEC SS-T LEC Y Motorless * Specications and dimensions for the 25A-series are the same as standard products.

10

Bore size [mm] Dd9 L l m d Part no.

240

200 200 LEJ 160 160 L7 [mm] L7 [mm] 120 120 LEL Y L7 80 80 LEM 40 40 Me LEY 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 m Vertical Work load [kg] Work load [kg] LES 200 200 LEPY LEPS LEPY LEPS 160 160 L8 [mm] L8 [mm] 120 120 LER Z 80 80 L8 LEH 40 40 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 Me LEY -X5 m Work load [kg] Work load [kg] 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y

VNH

A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51

JXCx-OMU0026

Yaxis [Axis speed calculation] Composite travel distance = Target position 1 2 Z Z Y Y X X 2 2 2 Composite speed 1 2 1 2 (X2, Y2, Z2) Xaxis speed = ( 1 2 X X / Composite travel distance) Composite speed Y axis speed = ( 1 2 Y Y / Composite travel distance) Composite speed Z axis speed = ( 1 2 Z Z / Composite travel distance) X axis Composite speed Current position (X1, Y1, Z1) Z

VNC

NBR, FKM t Aluminum alloy Piano wire y u i Note) et components determine the valve composition. Replacement Parts Part no. Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.

SFOD-OMT0010

M M ... Axis 1 ... Axis 2 0mm 50mm 60mm 100mm 0mm 50mm 60mm 100mm Origin position End position Origin position End position Actuator Load Load Actuator Motor Motor ... ... M M ... Axis 3 ... Axis 4 0mm 50mm 60mm 100mm End position 0mm 50mm 60mm 100mm End position Origin position Origin position 58 No.SFOD-OMT0010-B Flow chart (Reference) (1) Select input Step No.1. (Turn IN0 ON.

JXCx-OMT0002

M M ... Axis 1 ... Axis 2 0mm 0mm 50mm 60mm 100mm End position 50mm 60mm 100mm Origin position Origin position End position Actuator Load Actuator Load Motor Motor ... ... M M ... Axis 3 ... Axis 4 0mm 50mm 60mm 100mm End position 0mm 50mm 60mm 100mm End position Origin position Origin position -58No. JXC-OMT0002-C Flow chart (Reference) (1) Select Step No.1. (Turn IN0 ON.

MGP

50mm V = 200m/s 20 l =100mm V = 200m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 20 25 20 25 5 5 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg) 32, 40 50, 63 50, 63 32, 40 32, 40 32, 40 50, 63 32, 40 10

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

MLGP

Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32

MLGP

Bore Sizes 20 and 25/MLGPM20, 25 (Slide bearing) Operating range as stopper for MLGPM20, 25 100 l = 50mm l = 50mm 25 Weight of transferred object: m (kg) m m 20 5 10 10 20 30 40 50 Transfer speed: (m/min) Bore Sizes 32 to 100/MLGPM32 to 100 (Slide bearing) Operating range as stopper for MLGPM32 to 100 1000 l = 50mm l = 50mm Weight of transferred object: m (kg) m m 100 80 63 50 40 32

VXR21/22/23

74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5

70pvvna

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

PF-OMN0009_C

P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11

Thermo-chiller

(English), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs. (including 6 M8 bolts)8 Accessories Weight (dry state) kg 214 HRS200 Series 18-E700

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted * VP700 only Pilot Nil Internal pilot R External pilot Voltage Safety limit switch/Wiring 5 24 VDC Nil G1/2 (Made by OMRON) M M12 connector (Made by OMRON) Electrical entry S1 M12 connector (Made by Rockwell Automation) D DIN terminal Y DIN (EN175301-803) terminal * Refer to page 18 for details about type Y.