Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Table of Contents

System error Brown DC(+) Internal data error 12 to 24 VDC + Black OUT Load Internal data error Blue DC() 16-2-9 10 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 30 9.5 25 8 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

F

~60OC = 4~140F Operating Temperature -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 Nylon 12 POLYURETHANE TUBING SERIES TU, TIUB H O W T O O R D E R P O LY U R E T H A N E T U B I N G S E R I E S TU & TIUB Soft and very flexible tubing TU 20

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

Integrated Controller

20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220 Speed [mm/s] Stroke

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

0.4

13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ0250 2.7 (0.15) 10 or less 13 or less Double Rubber seal VQ0251 3.6 (0.2) 15 or less 20 or less VQ0 Metal seal VQ0350 2.0 (0.11) 20 or less 26 or less Closed center 50 Rubber seal VQ0351 2.7 (0.15) 25 or less 33 or less Metal seal VQ0450 2.0 (0.11) 20 or less 26 or less Exhaust center Rubber seal VQ0451 2.7 (0.15) 25 or less 33 or less Metal seal VQ1110 3.6 (0.2) 12 or less 15 or less

Ejector Valve Unit Series ZYY/ZYX 1

) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure 30 30 60 60 60 60 Air consumption Air consumption 20 20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2

High Purity Fluoropolymer

Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 15 16.5 28 14 12 6 4 20 23 36.5 17 18 9 5 F (E) 2-B L M 20 28 45 21 22 11 6 1/4 G 29 39 54 26 28 14 7 (E) (E) H L L 25 19 LQ1T62 LQ1T61 Class 2 to 5 39.5 49 69.5 36 36 18 8 Inch sizes Applicable tubing O.D.

Vacuum Pad

12 12 14 14 14 20 20 20 Vertical Vertical 2 2 2 Width across flat 7 Width across flat 7 Width across flat 7 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 6 1.2 1.8 1.8 0.8 0.5 0.8 6 8 4 6.5 8.5 4.5 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet Vacuum Inlet Dimensions Lateral ZP3-T04UM;-A10-U2 ZP3-T06UM;-A10-U2 ZP3-T08UM;-A10-U2 ZP3-T04UM;-A10-U4 ZP3-T06UM;-A10

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

4 (Mounting holes pitch) 40 4 A (Mounting holes pitch) A (Mounting holes pitch) 18 27 34 18 27 34 R P 50.2 R P 67.4 71.4 [72.7] 2-4.5 81 50.2 (Lead wire length) (Mounting holes) 300 (Lead wire length) (Mounting holes) 2-4.5 26 41.5 71.6 [78.1] 26 41.5 48.1 60.5 [66] 54.5 57.6 20 54.5 57.6 20 12 12 23 15 23 15 3-Rc (PT)1/4, 1/8 48 3-Rc (PT)1/4, 1/8 48 (P/A/R port) (P/A/R port) [ ] for AC

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

One-touch Fittings Series KQ2

D1 L1 D2 L2 A M Nylon 3 Urethane 2.5 3.2 KQ2L23-04 KQ2L04-06 KQ2L04-08 4 6 8 8 10 KQ2L06-10 38.5 19 2 3 11 9.6 7 17 25 26 35 13.5 15.5 10 8 14.5 22 4 10.4 18 4.2 4.2 16 6 KQ2L06-08 12.8 10 20 36.5 11.4 11.4 12 24.5 24 17 8 10 KQ2L08-10 15.2 12 23 39.5 21.6 14.9 20 26 18.5 12 KQ2L08-12 40.5 27 26 10 12 KQ2L10-12 18.5 17 26.5 42 35.2 25.0 29 30 21 12 16 KQ2L12-16 20.9 17 28.5 49.5 50.2 39.7