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Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

) 19 4 2 47 42 15 54 54 (Non-locking) Manual override 24.5 23 20 11.5 3 2.6 2(Mounting holes) 11 (Non-locking) Manual override 4-Rc(PT)1/8 33.5 46.5 46.5 21.8 (Bleed port) With filter (80 Mesh) 5-M5 X 0.8 (Piping port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Applicable cylinder Bore size (mm) Mounting Accessory 32, 40 BMB4-032 MDB, MBB, MDNB 50, 63 BMB4-050 Hexagon socket head set screw (M4 x 0.7 x 6 l) Quantity: 2 80, 100 BA4-063 Auto Switch Mounting Bracket Part No.

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

Y: 4.5 to 7 D: 6 to 8 47.5 2(A) 2(A) 13.5 Rc 3/8 (A port) Stations L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 10 359 344 9 326 311 8 293 278 7 260 245 6 227 212 5 194 179 4 161 146 3 128 113 2 95 80 : With light/surge voltage suppressor ( ): Dimensions for external pilot Individual exhaust: VV3P5-42Stations 3-03 28.5 3(R) 3(R) Rc 3/8 (G) (E) (T) (D, Y) (R port) N.C. N.O.

4 030 s/0.01 -82No.PS-OMV0003CN-G ISE70 ISE71 IP67 AC1000 V 1 50 M(DC500 V ) 050 -1060 () 3585RH() UL/CSA(E216656)CE EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms (IO-Link ) Input Data2 byteOutput Data0 byte ID 131(0x0083) ID ISE70-*-L2-*307(0x0133) ISE71-*-L2-*308(0x0134) 1(0 ms) 2 3 MPa/kPa 490 5https://www.smcworld.com 6 02 N02 F02 Rc1/4 NPT1/4 G1/4 C3604

NPN PNP 2 OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 2.0ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2 4 030 s/0.01 -86No.PS-OMV0008CN-E ISE70G ISE75G ISE76G ISE77G ISE78G IP67 AC500 V 1 50 M(DC500 V ) -570() -550-1060() 3585RH() CE UL/CSA(E216656)CE EMC RoHS EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms

(40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in.

40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (

mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

) 4.43 6.00 12.9 21.1 24.3 32.0 150 (1-1/2") 4.71 6.42 13.6 22.2 25.9 33.6 175 (1-3/4") 5.00 6.84 14.4 23.3 27.5 35.2 200 (2") 5.28 6.27 15.1 24.3 29.1 36.8 NCDQ8056-S NCDQ8075-S NCDQ8106-S NCDQ8150-S NCDQ8200-S NCDQ8250-S Super Compact with Built-in Magnet (OZ) 012 (1/8") 025 (1/4") 2.14 3.37 5.52 9.73 13.4 19.6 037 (3/8") 2.28 3.57 5.90 10.3 14.2 20.4 050 (1/2") 2.42 3.78 6.27 10.9 15.0

6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-5 * 9 B B-6 8 B A-6 3 (14.2) (2) 2 1 5.5 (18) (14) A1 B1 1 6 5 17.7 (3) 2 1 A6 B6 6.3 16 15 30.7 L (11) 59 - 15.3 [5m ] LE-CP--B(1) 2 A B-1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (4) + B-1 4 A-1

cartridge) 6 6 5 5 Discharge time (s) Discharge time (s) 4 4 30 Hz 1 Hz 30 Hz 3 3 1 Hz 2 2 1 1 Sensing AC Sensing AC 0 0 2,000 0 500 1,000 1,500 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 418 Technical Data IZS40/41/42 Series IZS IZS IZS42 1) Without air purge IZN 0 2 4 6 8 10 12 14 16 18 20 IZF 1 Hz 30 Hz Discharge time (s) ZVB IZD IZE IZH 0 50 100 150

AD27-6-A With bowl guard AD27-6C-A AD37m-6-A AD47m-6-A Normally open (N.O.) With bowl guard AD38m-6-A AD48m-6-A Automatic (Auto drain) Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.)

mA Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V 2 outputs Resistance Output Note 6) specifications NPN open collector (PF2A300, PF2A310) Switch output Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (with load current of 80 mA) 2 outputs PNP open collector (PF2A301, PF2A311) Accumulated pulse output NPN or PNP open collector