Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

KJ

(inch) Applicable fitting size d (inch) M Min. port size Note) Weight (g) D1 D2 L1 L2 A Model Applicable tubing KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 8.6 9.5 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 3 PWR 3 3 42.7 3 5 E 5 3 E 5 3 E 3 5 E PWR 43 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 1 1 1 1 BUS 0 BUS 0 0 0 PE PE X

ASR

ASF Pressure Valve: Series ASR Dual Speed Controller: Series ASD Knob Knob F C Knob A Knob G 15-16-7 8 Series ASR/ASQ Construction Pressure Valve: Series ASR Variable type Fixed type @1 @2 @5 @4 @3 @1 @2 @5 @4 @3 ASR430F-02 type ASR530F-03 type ASR630F-04 type ASR430F-02 type ASR530F-03 type ASR630F-04 type u o !3 u o !3 !8 !9 !7 !8 !9 !7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !

A

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

SX

port) 3 4 5 02 03 3 4 5 L plug connector (L): SX7 40(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g P M P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04

F

L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T O O R D E

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-

reduces flow setting time

-02-11 (S) 3/8 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-03-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 55.4 54 50.2 48.8 13.3 24.5 19.2 41 AS331FS1-03-09 (S) 5/16 13.2 37.1 23.5 52.2 14.2 42 AS331FS1-03-11 (S) 3/8 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS431FS1-04-11 (S) 3/8 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69 AS431FS1-04-13 (S) 1/2 18.5