High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

RSQ

QA F Q QB QU QW QW QU Bore size (mm) 29 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 P M5 x 0.8 Rc 1/8 Rc

CM2

I-020B I-032B I-040B E1 L1 MM H A1 MM +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 9 14 10 16 20 36 M8 X 1.25 9 9 10 14 18 46 66 41 9 M8 X 1.25 M10 X 1.25 9 14 10 18 20 38 9 9 10 14 22 48 69 45 9 M10 X 1.25 M14 X 1.5 15.5 16 20 14 22 24 55 12 16 20 24 69 92 50 12 M14 X 1.5 Double Knuckle Joint (mm) Bore size 20 25/32 40 A L NX2 R2 U2

Environment

Nil Without cable 2 2 5 5 A 10 !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10

MY2

38 EA 8.5 13 EC 9 13.5 EY 36 56.5 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) E 17.5 25 16 Series MY2C Side Support Side support MYC-SA G 2-H C B A F E D H 3.4 4.5 6.6 E 15 25 45 A 60.6 95.9 121.5 F 26 38 64 B 64.6 97.5 121.5 G 4.9 6.4 11.7 C 70.6 107.9 134.5 D 77.2 115.5 145.5 Model MYC-S16A MYC-S25A MYC-S40A Applicable cylinder MY2C16 MY2C25 MY2C40 Guide for Using Side Supports kg

44

14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9

MY1

Seal kit includes a grease pack (10 g). When !2 and !3 are shipped as single units, a grease pack (10 g per 1000 strokes) is included. Order with the following part number when only the grease pack is needed.

HEC-OM-S008

It can be set at a minimum of every 0.01 deg.C. Host STX 36H Offset ETX Check sum CR Symbol 100 10-1 10-2 (H) (L) Thermo-con ACK CR Note) As for symbols, minus is indicated by -(=2DH) and plus is indicated by 0(=30H).

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Guide Cylinder Series MGG

6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Proposals for Energy Saving

A 6% reduction of industrial CO emissions from 1990 levels is targeted for 2010. However, presentation of a plan for 10% or more reduction will be demanded.

Series SV

A A A A A A B A B 3 Stations Indicate the layout of valves, etc., with a "". 16 15 13 12 11 14 10 9 8 7 6 5 4 3 2 1 Quantity Valve stations Single solenoid Double solenoid Closed center Exhaust center Pressure center N.C./N.C. N.O./N.O. N.C.

Aluminum High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A parallel key is used instead of chamfer for size 40. X Y (mm) Size Y X Body (B) 10 3 19 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 114

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

Table of Contents

x 28l M3 x 33l M3 x 38l 4 M2.5 x 14l 14 4 5 M3 x 18l 18 5 5 M3 x 18l 18 5 5 M3 x 18l 18 5 With Auto Switch For Axial Mounting For Lateral Mounting B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33 38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10

Basic Type/Direct Mount Type

Note 3) For replacement of the 10 wear ring A, contact SMC or your nearest sales representative. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed.

TABLE OF CONTENTS

A Three Way Valve or a Two Way Normally Open Valve is operating at a high cycle rate (greater than 200 C.P.M.) 4. A Three Way Valve or a Two Way Normally Open Valve is operating at a long duty cycle (such as On Time=1 hour, Off Time = 10 minutes) 5.

A_HEC-OM-J017

It can be set at a minimum of every 0.01 deg.C. Host STX 36H Offset ETX Check sum CR Symbol 100 10-1 10-2 () () Thermo-con ACK CR Note)As for symbols, minus is indicated by -(=2DH) and plus is indicated by 0(=30H).