LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

37-80A-10 SY3000-37-80A-6 SY3000-37-80A-12 SY3000-37-80A-9 For 1 to 8 stations 10-SS5YJ3SA 21 32 For 9 to 16 stations Pilot valve (V111) Adapter plate For 1 to 8 stations 20 41 42 43 Existing valve 10-SS5YJ5SA For 9 to 12 stations (Orange) Manual override For 13 to 16 stations + B A For 1 to 8 stations Interface 10-SS5Y7SA 21 41 For 9 to 12 stations For 13 to 16 stations Note 1) The above

One-touch Fittings

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

MLGP

Unlocking port: Air exhausted 1. The lock ring is tilted by the spring force. 2. The tilting is increased by the load and the piston rod is securely locked. MLGP Ball bushing bearing Retraction Locking 9-11-2 9-11-3 3 Series MLGP Specific Product Precautions 1 Be sure to read before handling. Selection Pneumatic Circuit Warning 6.

MLGP

Unlocking port: Air exhausted 1. The lock ring is tilted by the spring force. 2. The tilting is increased by the load and the piston rod is securely locked. MLGP Ball bushing bearing Retraction Locking 9-11-2 9-11-3 3 Series MLGP Specific Product Precautions 1 Be sure to read before handling. Selection Pneumatic Circuit Warning 6.

MGP

Nm = 0.7375 ftlb 1kg = 2.2046lb 20 Compact Guide Cylinder With Air Cushion Series MGP Model Selection Selecting Conditions Vertical Horizontal l l m Mounting orientation m Maximum speed (mm/s) Graph (Slide bearing type) Graph (Ball bushing type) 400 200 400 200 1 7 , 1 8 1 , 2 3 , 4 1 5, 1 6 21 , 22 1 9 , 20 5 to 9 1 0 to 1 4 Selection Example 1 (Vertical Mounting) Selection Example 2 (Horizontal

SYJ300/500/700

+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

CQS

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0.5 19.5 5 10 6 5 5 10 17 0.5 1 [3.5] 6 16 1 21.5 5.5 9.5 5.5 4.5 5.5 9.5 19 1 0.5 [3] 5.5 Bore size (mm) RQ 20 5 25 9.5 13 9 0.5 9.5 13 22.5 5 3.5 [1] 9 25 7 27 11.5 14 10 1.5 11.5 14 24.5 7 5.5 [3] 10 MU Double Acting, Double Rod 12 19.5 9.5 5.5 0.5 9.5 5.5 5.5 1.5 17 5.5 3.5 [6] 1.5 D16 21.5 9 6 1 9 5 6 2 19

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

AC

Note 1) Only adujsting spring is different from standard.

Basic Type/Direct Mount Type

1 !4 !2 r i q @5 o u y t #0 @0 @8 !9 @2 @3 @7 18b @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no.

Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

AC Servo Motor Driver (SSCNET /H Type)

is displayed in units of 1 pulse.

CLQ

For details, refer to page 9-15-1.

High Vacuum Angle Valve, XL Series

Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14) (actuation port [1]-(7) is released).