ISO Standard Hydraulic Cylinder

MM B CD D E V MA Air release Cushion valve NB NA K F A B C W W CX RR L S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64 8 25 to 800 M6 x 1 M16 x 1.5 46 29 12 22 22 19 40 34 33 107 20 16 19 3/8 58 17 19 47 50 25 to 800 65 64 M8 x 1 M20 x 1.5 46.5 28.5 14 15 28 28 24 50 42 34 108 20 16 19 3/8 58 17 25 11 59 +0.043

MK

6 6.5 10.5 13.5 16.5 19.5 B 12.5 15.5 18.5 21.5 A 29 29.5 33 24 28.5 29 B 6.5 7 11 14 17 20 A 26 26.5 30 21 25.5 26 B 3.5 4 8 11 14 17 A 19.5 24 24.5 B 9.5 12.5 15.5 A 31.5 22.5 27 27.5 B 9.5 12.5 15.5 18.5 A 35.5 26.5 31 31.5 B 13.5 16.5 19.5 22.5 MK220 MK225 MK232 MK240 MK250 MK263 Auto Switch Mounting Bracket Part No.

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

Shock Absorbers and Rate Controls

A al B D Il f J t( l(l wt wt (I$odel) D!npirg (on!l!nl Pfir20f{f t, -2, -3 t40.2 t45-3 illA (L{t}frt33rl.5 9.5 29.8 30.5 8/.0 5.3 fl/A x/ato.g P | 25iltI l, -2, -3 t40.2145.3 N/A (MR M36 , r.5 9.5 29.0 30.5 87.0 ).J r.r/A N/A 33.0t6.0 Pfl2Zonr t, -2, -3 207.0 2l?.0 t/A (|'lr) n33,1.5 9.5 ?

RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

51

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Allowable kinetic energy Symbol Specification 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.

CLA

I b II' 10. "BjEli ~ :11 t y X 8N N X Y H S + Stroke h+f LS + Stroke II + Stroke ZZ + f + Stroke In the case of stroke exceedlno 1001, mounl reinforcing ring for tie-rod. p A ""Rear cylinder port E~K F .$. ~ ($j Long Stroke length of thread ~J ~-I ~ 1 ~ ~ (0500100) ~r hi ..., '\ !:J?

Floating Joint

Flange Type: JAF JAF180 200--X530 4 x J Center of sphere M U U D 60 G P T B C H R A Dimensions (mm) Maximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D T J G H Weight (kg) Nominal size Pitch 180 JAF180-40-150-X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-

Applicable Auto Switch Model

J wRefer to p.5.3-68 for the details.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.