CNS

V PLC Terminal conduit 24 V 2-wire 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire 3-wire (NPN) IC circuit Terminal conduit Relay, PLC 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V Grommet

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

stopper) Max. 10.5 (metal stopper) 2.4 Piping port 2-M3 x 0.5 Without magnet and switch rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model H J M S Z AA 12 2-M2 x 0.4 depth 3 For magnet mounting MXP65 25 38 33.5 37 5 45 2 35 53 48.5 47 10 60 9.5 MXP6-10 8 Series MXP Dimensions MXP10 2-M3 x 0.5 depth 3 Z 3 With metal stopper 2-M3 x 0.5 depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M

SFOD-OMT0009CN

150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400 1500 [mm/s] 48 () [mm/s] 78 () 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 [mm/s] 420 280 420 280 420 280 [mm/s] 30 20 30 20 30 20 () [mm/s] 38 25 38 25 38 25 () 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40

ZP3

19 12 1.8 E2 Dimensions Per Vacuum Inlet: One-touch Fitting Model G H J Fitting part min. hole size Fitting part no.

Cylinder with Lock Series MNB

size (mm) J T P MM N S V GF K Q H W ZZ GL GL1 GR GE VA 34 1/8 M10 x 1.25 27 154 6.5 32 18.3 6 37 47 6.5 211 8.5 12 4 88.5 13 M6 x 1.0 39.5 1/4 M14 x 1.5 27 161 8 40 19.5 6 41.5 51 9 222 10 12 4 96.5 16.5 M6 x 1.0 47 1/4 M18 x 1.5 31.5 183 9 50 22.4 7 47.5 58 10.5 253 12.5 15 5 111.2 20 M8 x 1.25 55.5 3/8 M18 x 1.5 31.5 197 8.5 63 20.7 7 55 58 12 267 17.5 12 9 123.5 23 M8 x 1.25 61.5 3/8

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

CLS

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

70astamb1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) Water resistant (2-color indication) 12 V 2-wire Y7BA Lead wire length symbols: Solid state switches marked with are produced upon receipt of order. 0.5 mNil (Example) Y59A 3 mL (Example) Y59AL 5 mZ (

mb1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) Water resistant (2-color indication) 12 V 2-wire Y7BA Lead wire length symbols: Solid state switches marked with are produced upon receipt of order. 0.5 mNil (Example) Y59A 3 mL (Example) Y59AL 5 mZ (

Series IDG

18 405 171 Drain discharge With float type auto drain With drain guide Drain Drain J H N.O.: Black N.C.: Gray ( ) Maintenance space 100mm or more Thread size: 1/4 (without valve mechanism) Width across flats 17 Purge air discharge tubing port for dehumidification Applicable tube O.D.: 12 (NPT threads: 1/2 inch) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) 26 Series IDG Membrane Air

Mechanical Valves Series NVM, NVFM, NVZNI

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

IIIIIII

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

39

Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc E RB B (mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63

JXCx-OMT0001CN

1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 mm/s 1100 1400 1500 [mm/s] () 48 [mm/s] () 78 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 mm/s 420 280 420 280 420 280 [mm/s] () 30 20 30 20 30 20 [mm/s] () 38 25 38 25 38 25 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205