Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

Mechanical Valves Series NVM, NVFM, NVZNI

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

IIIIIII

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 111 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front trunnion type: CHAWU Z T T Cushion adjustment screw 2-Rc P Width across flats G TT GA Air release GA M Width across flats G 4-J V V MM MM R (max.)

CRQ2

Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series. Caution The angle adjustment bolt is set at random within the adjustable rotating range.

Compressed Air Preparation Filter

With bowl guard C2SFm-CJ-D C3SFm-J-D C4SFm-J-D Polycarbonate, Stainless steel Normally closed (N.C.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

LEY-OM007

40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 ABS()/ / INC()/ / 1 30[mm] No.0 No.0INC 10 (INC) c 50[mm] 0 10 20 30 40 50 [mm] 2 30[mm] No.1 No.1INC

SMC Pneumatic Clean Series

+ Stroke ZZ + Stroke (mm) 2 1 10 10 10 10 GB M4 x 0.7 depth 7 J M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 1/8 1/8 1/8 1/8 P 27 19.5 19.5 15.5 AL Bore size Standard stroke range Up to 200 Up to 300 Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5

Thermo-chiller/Rack Mount Type

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

9 16 MXP16-PS 8-8-13 13 Series MXP Dimensions: MXPJ6 4-M3 x 0.5, depth 3 7 5 H 3 18 1 0.05 D B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting

IDG

With float type auto-drain With drain guide Port size A B C D E J K L M N F G H Model P IDG3M/3HM/5M/5HM IDG10M/10HM 157 201 226 150 146 56 87 196 162 158 99 1/8, 1/4 5.5 66.5 35 210 196 15 9 IDG20M/20HM 1/4, 3/8 205 201 66 130 209 13 12 223 209 IDG30M/30HM 162 158 87 6 78 40 20 303 IDG30LM 149 145 56 86 196 9 210 196 5.5 7 5.5 70 95 70 35 50 35 15 22 15 IDG50M/50HM 3/8 177 172 80 87 241

Modular F.R.L. Unit

Page 13 T-interface M5 x 0.8 1/8, 1/4, 3/8, 1/2 Page 13 Redirects the air flow. Pressure switch with piping adapter Compact switch and piping adapter integrated into one piece. Page 14 1/8, 1/4, 3/8, 1/2, 3/4 Check valve Page 15 1/8, 1/4, 3/8 Prevents back flow from lubricator.

RB/RBL/RBQ

J J N m/s2 1.

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.